This paper presents a flame retardant 4 (FR4)-based electromagnetic scanning micromirror, which aims to overcome the limitations of conventional microelectromechanical systems (MEMS) micromirrors for the large-aperture and low-frequency scanning applications. This micromirror is fabricated through a commercial printed circuit board (PCB) technology at a low cost and with a short process cycle, before an aluminum-coated silicon mirror plate with a large aperture is bonded on the FR4 platform to provide a high surface quality. In particular, an electromagnetic angle sensor is integrated to monitor the motion of the micromirror in real time. A prototype has been assembled and tested. The results show that the micromirror can reach the optical scan angle of 11.2 ${}^{\circ }$ with a low driving voltage of only 425 mV at resonance (361.8 Hz). At the same time, the signal of the integrated angle sensor also shows good signal-to-noise ratio, linearity and sensitivity. Finally, the reliability of the FR4 based micro-mirror has been tested. The prototype successfully passes both shock and vibration tests. Furthermore, the results of the long-term mechanical cycling test (50 million cycles) suggest that the maximum variations of resonant frequency and scan angle are less than 0.3% and 6%, respectively. Therefore, this simple and robust micromirror has great potential in being useful in a number of optical microsystems, especially when large-aperture or low-frequency is required.

This paper presents a dispersive near-infrared spectrometer with features of miniaturization, portability and low cost. The application of a resonantly-driven scanning grating mirror (SGM) as a dispersive element in a crossed Czerny–Turner configuration enables the design of a miniaturized spectrometer that can detect the full spectra using only one single InGaAs diode. In addition, a high accuracy recalculation is realized, which can convert time-dependent measurements to spectrum information by utilizing the deflection position detector integrated on SGM and its associated closed-loop control circuit. Finally, the spectrometer prototype is subjected to a series of tests to characterize the instrument’s performance fully. The results of the experiment show that the spectrometer works in a spectral range of 800 nm–1800 nm with a resolution of less than 10 nm, a size of 9 × 7 × 7 cm³, a wavelength stability better than ±1 nm and a measuring time of less than 1 ms. Furthermore, the power consumption of the instrument is 3 W at 5 V DC, and the signal-to-noise ratio is 3267 at full scale. Therefore, this spectrometer could be a potential alternative to classical spectrometers in process control applications or could be used as a portable or airborne spectroscopic sensor.

Wind energy harvesting is a promising way to offer power supply to low-power electronic devices. Miniature wind-induced vibration energy harvesters, which are currently being focused on by researchers in the field, offer the advantages of small volume and simple structure. In this article, an analytical model was proposed for the kinetic analysis of a flutter-based electromagnetic wind energy harvester. As a result, the critical wind speeds of energy harvesters with different magnet positions were predicted. To experimentally verify the analytical predictions and investigate the output performance of the proposed energy harvester, a small wind tunnel was built. The critical wind speeds measured by the experiment were found to be consistent with the predictions. Therefore, the proposed model can be used to predict the critical wind speed of a wind belt type energy harvester. The experimental results also show that placing the magnets near the middle of the membrane can result in lower critical wind speed and higher output performance. The optimized wind energy harvester was found to generate maximum average power of 705 μW at a wind speed of 10 m/s, offering application prospects for the power supply of low-power electronic devices. This work can serve as a reference for the structural design and theoretical analysis of a flutter-based wind energy harvester.

The performance of vibration energy harvesters is usually restricted by their frequency bandwidth. The double-clamped beam with strong natural nonlinearity is a simple way that can effectively expand the frequency bandwidth of the vibration energy harvester. In this article, a nonlinear electromagnetic vibration energy harvester with monostable double-clamped beam was proposed. A systematic analysis was conducted and a distributed parameter analytical model was established. On this basis, the output performance was estimated by the analytical model. It was found that the nonlinearity of the double-clamped beam had little influence on the maximum output, while broadening the frequency bandwidth. In addition, the resonant frequency, the frequency bandwidth, and the maximum output all increased following the increase of excitation level. Furthermore, the resonant frequency varies with the load changes, due to the electromagnetic damping, so the maximum output power should be gained at its optimum load and frequency. To experimentally verify the established analytical model, an electromagnetic vibration energy harvester demonstrator was built. The prediction by the analytical model was confirmed by the experiment. As a result, the open-circuit voltage, the average power and the frequency bandwidth of the electromagnetic vibration energy harvester can reach up to 3.6 V, 1.78 mW, and 11 Hz, respectively, under only 1 G acceleration, which shows a prospect for the application of the electromagnetic vibration energy harvester based on a double-clamped beam.

Piezoelectric vibration energy harvesting has attracted increasing attention in the last decade, and one of the major challenges is concerning the design of these harvesters. Most researchers optimize the piezoelectric vibration energy harvester at constant excitation acceleration. However, in practical applications, the allowable stress of the cantilevered piezoelectric vibration energy harvester limits the maximum displacement of the cantilever. Thus, both the maximum displacement of the cantilever and the excitation acceleration should be considered when the piezoelectric vibration energy harvester is optimized. In this article, the damping ratio and electromechanical coefficient are optimized for maximum power output. The results show that the electromechanical conversion efficiency is not more than 50%. The results also show that the piezoelectric vibration energy harvester with low damping ratio does not always have high power output, which challenges previous literature suggestion that lower damping ratio tends to higher power output. And the analysis of the electromechanical coefficient shows that the power output decreases beyond an optimal electromechanical coefficient, which is consistent with the previous findings.

This paper performs a detailed investigation on the electromagnetic angle sensor integrated in the flame retardant 4 (FR4)-based scanning micromirror. An accurate theoretical model is presented, especially considering the coupling effect between the driving and sensing coils. Experimental results agree well with the theoretical results, and show a sensitivity of 55.0 mV_p/° and a high signal-to-noise ratio (SNR) of 71.9 dB. Moreover, the linearity of the angle sensor can still reach 0.9995, though it is affected slightly by the coupling effect. Finally, the sensor’s good feasibility for feedback control has been further verified through a simple closed-loop control circuit. The micromirror operated with closed-loop control possesses better long-term stability and temperature stability than that operated without closed-loop control.