Many emerging applications in the terahertz (THz) frequency range demand highly sensitive, broadband detectors for room-temperature operation. Field-effect transistors with integrated antennas for THz detection (TeraFETs) have proven to meet these requirements, at the same time offering great potential for scalability, high-speed operation, and functional integrability.

We present THz direct detectors based on an AlGaN/GaN high electron mobility transistor (HEMT), featuring excellent optical sensitivity and low noise-equivalent power (NEP). These detectors are monolithically integrated with various antenna designs and exhibit state-of-the-art performance at room temperature. Their architecture enables straightforward scaling to two-dimensional formats, paving the way for terahertz focal plane arrays (FPAs). In particular, for one detector type, a fully realized THz FPA has been demonstrated in this paper. Theoretical and experimental characterizations are provided for both single-pixel detectors (0.1–1.5 THz) and the FPA (0.1–1.1 THz). The broadband single detectors achieve optical sensitivities exceeding 20 mA/W up to 1 THz and NEP values below 100 pW/$\sqrt{\mathrm{Hz}}$. The best optical NEP is below 10 pW/$\sqrt{\mathrm{Hz}}$ at 175 GHz. The reported sensitivity and NEP values were achieved including antenna and optical coupling losses, underlining the excellent overall performance of the detectors.

We have developed monolithically integrated THz detectors that operate at room temperature, covering a frequency range from 100 GHz to 1500 GHz with exceptional sensitivity and speed. These detectors are scalable to larger arrays, enabling the realization of THz imaging systems that were previously unattainable. In this paper, we present the THz detectors and a prototype THz scanner developed as a technology demonstrator, showcasing the groundbreaking capabilities of this innovative technology.