This paper presents a survey of the status of five active THz imaging modalities which we have developed and investigated during the last few years with the goal to explore their potential for real-time imaging. We start out by introducing a novel waveguide-based all-electronic imaging system which operates at 812 GHz. Its salient feature is a 32-pixel linear detector array heterodyne-operated at the eighth subharmonic. This array in combination with a telescope optics for object distances of 2-6 m reaches a data acquisition speed suited for real-time imaging. The second system described then is again an all-electronic scanner (now for around 300 GHz ), designed for object distances of ≥ 8 m , which combines mechanical scanning in vertical direction, synthetic-aperture image generation in horizontal direction, and frequency-modulated continuous-wave sweeping for the depth information. The third and fourth systems follow an optoelectronic approach by relying on several- to multi-pixel parallel electrooptic detection. One imager is based on a pulsed THz-OPO and homodyne detection with a CCD camera, the other on either continuous-wave electronic or femtosecond optoelectronic THz sources and a photonic-mixing device (PMD) camera. The article concludes with a description of the state of the art of imaging with focal-plane arrays based on CMOS field-effect transistors.

Nondestructive quality inspection with terahertz waves has become an emerging technology, especially in the automotive and aviation industries. Depending on the specific application, different terahertz systems—either fully electronic or based on optical laser pulses—cover the terahertz frequency region from 0.1 THz up to nearly 10 THz and provide high-speed volume inspections on the one hand and high-resolution thickness determination on the other hand. In this paper, we present different industrial applications, which we have addressed with our terahertz systems within the last couple of years. First, we show three-dimensional imaging of glass fiber–reinforced composites and foam structures, and demonstrate thickness determination of multilayer plastic tube walls. Then, we present the characterization of known and unknown multilayer systems down to some microns and the possibility of measuring the thickness of wet paints. The challenges of system reliability in industrial environments, e.g., under the impact of vibrations, and effective solutions are discussed. This paper gives an overview of state-of-the-art terahertz technology for industrial quality inspection. The presented principles are not limited to the automotive and aviation industries but can also be adapted to many other industrial fields.

Many emerging applications in the terahertz (THz) frequency range demand highly sensitive, broadband detectors for room-temperature operation. Field-effect transistors with integrated antennas for THz detection (TeraFETs) have proven to meet these requirements, at the same time offering great potential for scalability, high-speed operation, and functional integrability.

We present broadband high sensitivity THz detectors based on 90 nm CMOS technology with state-of-the-art performance. The devices are based on bow-tie and log-spiral antennacoupled field-effect transistors (FETs) for the detection of freespace terahertz (THz) radiation (TeraFETs). We report on optimized performance, which was achieved by employing an in-house developed physics-based model during detector design and thorough device characterization under THz illumination. The implemented detector with bow-tie antenna design exhibits a nearly flat frequency response characteristic up to 2.2 THz with an optical responsivity of 45 mA/W (or 220 V/W). We have determined a minimum optical noise-equivalent power (NEP) as low as 48 pW/√Hz at 0.6 THz and 70 pW/√Hz at 1.5 THz. The results obtained at 1.5 THz are better than the best narrowband TeraFETs reported in the literature at this frequency and only up to a factor of four inferior to the best narrowband devices at 0.6 THz.