The formation of complex surface morphology of a multilayer structure, the processes of which are based on quantum phenomena, is a promising domain of the research. A hierarchy of pore of various sizes was determined in the initial sample of porous silicon by the atomic force microscopy. After film deposition by spray pyrolysis, ZnO nanoclusters regularly distributed over the sample surface were formed. Using the electron paramagnetic resonance (EPR) method it was determined that the localization of paramagnetic centers occurs more efficiently as a result of the ZnO deposition. An increase in the number of deposited layers, leads to a decrease in the paramagnetic center relaxation time, which is probably connected with the formation of ZnO nanocrystals with energetically stable properties. The nucleation and formation of nanocrystals is associated with the interaction of particles with an uncompensated charge. There is no single approach to determine the mechanism of this process. By the EPR method supplemented with the signal cyclic saturation, spectral manifestations from individual centers were effectively separated. Based on electron paramagnetic resonance and photoluminescence studies it was revealed that the main transitions between energy levels are due to oxygen vacancies and excitons.

The detection of particles with uncompensated charge and the determination of the features of their interaction during the formation of nanocrystals on substrates with a developed surface are an interesting area of research. The porous surface formed via the electrochemical etching of silicon acquired fractal properties as a result of the deposition of zinc oxide layers. Microscopy methods using different resolutions revealed a hierarchical structure of the surface, where each of the three consecutive levels contains uniformly distributed formations. The deposition of 20 layers of ZnO maximizes the concentration of nanocrystals at the pore boundaries, while the deposition of 25 layers leads to the formation of a continuous layer. The increase in photoluminescence intensity with an increase in the number of deposited layers is due to the saturation of surface nanostructures with electrons through several mechanisms. Electron paramagnetic resonance (EPR) studies have shown that the main mechanism of radiation recombination is the capture of electrons on oxygen vacancies. The different nature of the EPR saturation of the signal of interconnected paramagnetic centers revealed the formation of zinc oxide particles at the boundaries of pores with different sizes. The results of these studies of surface-active structures effectively complement the knowledge about sensory materials.

A hierarchical surface that includes objects with different sizes, as a result of creating local fields, initiates a large number of effects. Micropores in the composition of macropores, as well as nanoclusters of the substance, were detected by scanning electron and atomic force microscopies on the surface of ZnO/Por-Si samples. An identical fractal dimension for all levels of the hierarchy was determined for these structures, which is associated with the same response to external excitation. Photoluminescence studies have shown the presence of localized levels in the band gap, with the probability of capturing both electrons and holes, which ensures charge transitions between energy bands. Decomposition of the electron paramagnetic resonance (EPR) signal into components made it possible to determine the manifestations of various types of interaction between paramagnetic particles, including the hyperfine structure of the spectrum. The ordering of the structure of the substance as a result of sequential annealing in the range from 300 to 500 °C was revealed in the EPR spectrum. This fact, as well as photo- and gas sensitivity for all types of samples studied, confirms the prospects of using these structures as sensors.

The stability of structures to various influences determines the effectiveness of the sensors that are based on them. A modified method of metal-stimulated electrochemical etching and hydrothermal etching made it possible to synthesize the combined structure of silicon nanowires and ZnO crystallites. The hexagonal structure of zinc oxide crystallites was determined by the X-ray diffraction method. Several causes of radiative recombination have been identified in the photoluminescence spectra, and their nature is associated with the defective structure of zinc oxide. Electron paramagnetic resonance (EPR) spectroscopy studies have revealed energy-stable, uniformly distributed and low-dimensional nanostructures.

The formation of structures of different sizes on the surface of a single sample and the study of the mechanisms of their excitations and energy transitions is a promising area of research. ZnO/SiO₂/Si heterostructures were formed by two-stage electrochemical etching of silicon wafers and synthesizing zinc oxide nanoparticles using sol-gel technology. By scanning electron and atomic force microscopies, various pores and clusters were identified. The presence of five levels of surface hierarchy provided the synthesis of light-emitting particles with different properties. Light emission mechanisms are associated with the recombination of excitons and the hyperfine structure of charged particles trapped on oxygen vacancy.

The study of the processes of low-temperature synthesis of one-dimensional particles, which are the basis for two- and three-dimensional structures, is relevant for materials science. The modified metal-stimulated electrochemical etching method made it possible to synthesize silicon nanowires with an average thickness of about 292.6 nm. Scanning electron microscopy has shown the formation of nanowires, flower-like structures, and clusters of matter after the deposition of zinc oxide on the porous surface. The hexagonal structure of ZnO crystallites was determined by X-ray diffraction spectroscopy. Studies of the initial sample by electron paramagnetic resonance (EPR) spectroscopy revealed a narrow signal in the center of the spectrum. The subtraction of the EPR spectra with a sequential increase in microwave power up to 8 mW shows the absence of saturation of the signal. This indicates an almost free flow of charges through the surface nanostructures under the influence of an external field. Heat treatment in an air atmosphere at 300 °C caused a significant increase in the intensity of the EPR spectrum. This led to an increase in the intensity of charge transfer through paramagnetic centers.