Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus, band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities, especially because it retains most of its properties and versatility in the thin-film form. This review focuses on applications where the CMOS integration of AlN MEMS has been effectively demonstrated. First, the fundamental concepts of piezoelectricity on polycrystalline $c$ -axis oriented thin-films are introduced and AlN is compared to other common piezoelectric materials, namely LiNbO ₃ , LiTaO ₃ , quartz, lead zirconate titanate (PZT), ZnO and GaN by thoroughly discussing the material properties, processing and technological implications. After presenting the possible MEMS-CMOS integration strategies, recent demonstrations of AlN-based devices are reviewed, namely energy harvesters, film bulk acoustic resonators (FBAR), contour mode resonators (CMR), gas sensors, imagers, microphones, transducers for chip-scale communication and calorimetric sensors. Finally, other recent applications/integration opportunities are outlined for AlN-based micro-mirrors, flexible sensors and transducers for liquid media and harsh environments. [2022-0006]

High-resolution pull-in-based microelectromechanical system (MEMS) inclinometers are presented in this paper. Pull-in is characterized by the sudden loss of stability in electrostatically actuated parallel-plate structures, and since pull-in voltage is stable and easy to measure, it enables an effective transduction mechanism that does not require complex and stable capacitive readout electronics. The MEMS devices used to test the novel architecture have differential actuation electrodes resulting in two pull-in voltages that change differentially with applied acceleration. Dedicated MEMS microstructures with extra proof mass show high sensitivity; 269 mV/° with a nonlinearity <;0.5% FS (Full Scale of ±23°). The measured noise is limited by the actuation mechanism, setting the sensor's resolution at 75 $\mu$ °; high above state-of-the-art MEMS devices. [2014-0156].

This paper reports on a study concerning the design of an X-ray detector that is suitable to analyze a small area with high spatial resolution. The indirect method of X-ray detection is used, i.e., the X-rays are first converted into visible light, which is then detected. In this design, an array of CsI:Tl scintillators, encapsulated by aluminum walls, is coupled with an array of CMOS photodetectors. This structure, patented and described theoretically by the authors in previous works, can be obtained using the SU-8 negative photoresist as a sacrificial layer. The experimental work consisted in the deposition of a scintillator layer, and an aluminum layer on the active area of a commercially available digital imaging sensor, thus supporting the developed detector design. X-ray imaging tests were performed using the PHILIPS X'Pert equipment. Promising results were obtained, featuring high resolution and detail.

This study aimed to evaluate a clothing prototype that incorporates sensors for the evaluation of pressure, temperature, and humidity for the prevention of pressure injuries, namely regarding physical and comfort requirements. A mixed-method approach was used with concurrent quantitative and qualitative data triangulation. A structured questionnaire was applied before a focus group of experts to evaluate the sensor prototypes. Data were analyzed using descriptive and inferential statistics and the discourse of the collective subject, followed by method integration and meta-inferences. Nine nurses, experts in this topic, aged 32.66 ± 6.28 years and with a time of profession of 10.88 ± 6.19 years, participated in the study. Prototype A presented low evaluation in stiffness (1.56 ± 1.01) and roughness (2.11 ± 1.17). Prototype B showed smaller values in dimension (2.77 ± 0.83) and stiffness (3.00 ± 1.22). Embroidery was assessed as inadequate in terms of stiffness (1.88 ± 1.05) and roughness (2.44 ± 1.01). The results from the questionnaires and focus groups’ show low adequacy as to stiffness, roughness, and comfort. The participants highlighted the need for improvements regarding stiffness and comfort, suggesting new proposals for the development of sensors for clothing. The main conclusions are that Prototype A presented the lowest average scores relative to rigidity (1.56 ± 1.01), considered inadequate. This dimension of Prototype B was evaluated as slightly adequate (2.77 ± 0.83). The rigidity (1.88 ± 1.05) of Prototype A + B + embroidery was evaluated as inadequate. The prototype revealed clothing sensors with low adequacy regarding the physical requirements, such as stiffness or roughness. Improvements are needed regarding the stiffness and roughness for the safety and comfort characteristics of the device evaluated.