This work presents the new development of a nanopositioning machine for a large operating range. The machine, called NPS6D200, provides Ø200 $\mathrm{m}$$\mathrm{m}$ planar and 25 $\mathrm{m}$$\mathrm{m}$ vertical travel range and applies a 6D closed loop control with all drive forces applied directly to the same moving part. The stage architecture evolves from an integrated planar direct drive which is extended by high precision vertical positioning capability. The setup of the machine and the characteristics of the different subsystems are presented together with investigations into the positioning performance that is achieved with the NPS6D200. In constant setpoint operation as well as in synchronized multiaxial motion tasks over three orders of magnitude, the system shows servo errors only in the low nanometer range and proves suitable as positioning platform for nanoscience applications.

An automated design methodology for electromagnetic harvesters is necessary for the cost-effective design of adapted energy harvesters to be used in application-specific requirements. With the help of the automated design methodology presented in this paper, application-specific designs can be generated quickly and easily, and systematic comparisons between the structures can be made to select the best suited harvester structure. For the dimensioning of the design parameters, both analytical approximation formulas and models for coupling with field calculations were implemented. An exemplary structure comparison based on three scenarios shows the advantageous suitability of one topology in large areas of the aspect ratio.

This paper focuses on the systematic comparison of different basic structures for electromagnetic energy harvester to increase the power density of the converters. The goal is to select the optimal basic structure depending on the specific requirements. To achieve this, an automated design methodology was developed and implemented in MATLAB^®. The systematic comparison and automation allows a cost-effective design of adapted energy harvesters for application-specific requirements. In studies, the influence of different boundary conditions on the evaluation of basic structures was investigated. It can be shown that none of the structures always delivers the highest output power.