This paper explores large area application of tip-based nanofabrication by field emission scanning probe lithography and showcases the simultaneous possibility of atomic force microscopy on macroscopic scales. This is made possible by the combination of tip-based technology and a planar nanopositioning and nanomeasuring machine. Using long range atomic force microscopy measurement of regular grating structures, the performance of the machine is thoroughly characterized over the full 100 mm range of motion of the positioning machine, which was confirmed by repeated measurements. After initially focussing on achieving the minimum line width of < 40 nm in microscopic areas, a grating with a pitch of 1 μm is additionally fabricated over a total length of 10 mm, whereby the dimensions and deviations are also considered.

This work presents the new development of a nanopositioning machine for a large operating range. The machine, called NPS6D200, provides Ø200 $\mathrm{m}$$\mathrm{m}$ planar and 25 $\mathrm{m}$$\mathrm{m}$ vertical travel range and applies a 6D closed loop control with all drive forces applied directly to the same moving part. The stage architecture evolves from an integrated planar direct drive which is extended by high precision vertical positioning capability. The setup of the machine and the characteristics of the different subsystems are presented together with investigations into the positioning performance that is achieved with the NPS6D200. In constant setpoint operation as well as in synchronized multiaxial motion tasks over three orders of magnitude, the system shows servo errors only in the low nanometer range and proves suitable as positioning platform for nanoscience applications.

The important change in the transition from partial to high automation is that a vehicle can drive autonomously, without active human involvement. This fact increases the current requirements regarding ride comfort and dictates new challenges for automotive shock absorbers. There exist two common types of automotive shock absorber with two friction types: The intended viscous friction dissipates the chassis vibrations, while the unwanted solid body friction is generated by the rubbing of the damper’s seals and guides during actuation. The latter so-called static friction impairs ride comfort and demands appropriate friction modeling for the control of adaptive or active suspension systems. In this article, a simulation approach is introduced to model damper friction based on the most friction-relevant parameters. Since damper friction is highly dependent on geometry, which can vary widely, three-dimensional (3D) structural FEM is used to determine the deformations of the damper parts resulting from mounting and varying operation conditions. In the respective contact zones, a dynamic friction model is applied and parameterized based on the single friction point measurements. Subsequent to the parameterization of the overall friction model with geometry data, operation conditions, material properties and friction model parameters, single friction point simulations are performed, analyzed and validated against single friction point measurements. It is shown that this simulation method allows for friction prediction with high accuracy. Consequently, its application enables a wide range of parameters relevant to damper friction to be investigated with significantly increased development efficiency.

The most important change in the transition from partial to high automation is that the vehicle can drive autonomously, without active human involvement. This fact increases the current requirements regarding ride comfort and dictates new challenges for automotive shock absorbers. There exist two common types of automotive shock absorbers with two friction types. The intended viscous friction dissipates the chassis’ vibrations, while the unwanted solid body friction is generated by the rubbing of the damper’s seals and guides during actuation. The latter so-called static friction impairs ride comfort and demands appropriate friction modeling for the control of adaptive or active suspension systems. In the current article, the simulation approach introduced in part 1 of this study is validated against a single friction point and full damper friction measurements. To achieve that, a friction measurement method with novel test rigs has been developed, which allows for reliable determination of the friction behavior of each single friction point, while appropriately resembling the operating conditions of the real damper. The subsequent presentation of a friction simulation using friction model parameters from different geometry shows the general applicability of the overall friction investigation methodology. Accordingly, the presented simulation and measurement approaches enable the investigation of dynamic friction in automotive shock absorbers with significantly increased development efficiency.

An automated design methodology for electromagnetic harvesters is necessary for the cost-effective design of adapted energy harvesters to be used in application-specific requirements. With the help of the automated design methodology presented in this paper, application-specific designs can be generated quickly and easily, and systematic comparisons between the structures can be made to select the best suited harvester structure. For the dimensioning of the design parameters, both analytical approximation formulas and models for coupling with field calculations were implemented. An exemplary structure comparison based on three scenarios shows the advantageous suitability of one topology in large areas of the aspect ratio.

High-precision dimensional fabrication and measurements in modern manufacturing and metrology demand positioning systems that offer sub-10 nm performance. Here, the authors present the analysis of a large-range nanopositioning system designed to reach results close to this requirement. The system operates within a volume of ∅200 mm × 25 mm and implements six-degree-of-freedom (6-DOF) positioning control based on direct magnetic drives, differential laser interferometers and an autocollimator. Additionally, it integrates an in-built laser focus sensor (LFS) which is normally used for sample height control during motion, but which, as shown in this paper, can also conveniently be used as tool for in-situ performance characterization of the stage. Experimental evaluations show remarkable long-term repeatability results in large-range distance measurements, with scale standard deviation values below 15 nm over a range of 155 mm in uninterrupted 11 days measurements. These experiments involve the measurement of positions on a cross grid artifact by a new method using the LFS for lateral measurements and applying corrections for environmental conditions and sample temperature variation. The results of the analysis highlight the suitability of the stage architecture for precise positioning tasks in a variety of industrial and scientific environments.