This work deals with various investigations into the accuracy of a newly developed planar nanopositioning machine. This machine, called Nanofabrication Machine 100 (NFM-100), has a positioning range of 100 mm in diameter. To determine the precision, various movement scenarios are performed with the machine table, and the trajectory deviation from the set trajectory is determined. In particular, the focus is on high velocities of up to 20 mm/s. Even at high speeds in the range of several millimetres per second, this machine can impress with its performance and only has a deviation in the nanometre range.

This work presents the new development of a nanopositioning machine for a large operating range. The machine, called NPS6D200, provides Ø200 $\mathrm{m}$$\mathrm{m}$ planar and 25 $\mathrm{m}$$\mathrm{m}$ vertical travel range and applies a 6D closed loop control with all drive forces applied directly to the same moving part. The stage architecture evolves from an integrated planar direct drive which is extended by high precision vertical positioning capability. The setup of the machine and the characteristics of the different subsystems are presented together with investigations into the positioning performance that is achieved with the NPS6D200. In constant setpoint operation as well as in synchronized multiaxial motion tasks over three orders of magnitude, the system shows servo errors only in the low nanometer range and proves suitable as positioning platform for nanoscience applications.

Zusammenfassung: In der vorliegenden Arbeit werden zwei Nanopositioniersysteme in Bezug auf ihre Positioniergenauigkeit während der Bewegung verglichen. Beide Systeme besitzen einen planaren Bewegungsbereich von ≥ 100 mm, werden durch Linearmotoren angetrieben und die Position wird durch Laserinterferometer gemessen. Große Unterschiede existieren jedoch im mechanischen Aufbau. Das erste Positioniersystem ist ein zweiachsiger Demonstrator dessen zwei Läufer auf Wälzkörpern gelagert sind. Dies führt zu dem Problem der besonders im Nanometerbereich stark nichtlinearen Reibung. Bei dem zweiten Positioniersystem kommen Luftlager zum Einsatz und darüber hinaus handelt es sich nur um einen Läufer, welcher drei Freiheitsgrade besitzt. Es wird gezeigt, dass durch regelungstechnische Methoden der Reibkraftkompensation die Positioniergenauigkeit beider Systeme bis zu einer Geschwindigkeit von ca. 1 mm/s vergleichbar ist.

Nanopositioning systems (NPS) are used in various fields of technology, such as micro- and nanoelectronics, optics, and biotechnology, where demands for higher dynamic performance and sub-nanometer accuracy are continuously increasing. Thus, the determination and compensation of stress-induced negative impacts on the systems gain significance to ensure accurate positioning. Major contributors are temperature gradients. Hence, understanding and predicting temperature changes is crucial for improving such systems. This work focuses on a substructure of an NPS drive system consisting of coil assemblies. This substructure serves as a primary heat source due to the occurrence of ohmic losses, leading to an increase in temperature and therefore significantly influencing the thermal deformation. The aim of this paper is to compose a CFD model with reduced submodels of the coil assembly, which, in comparison to experimental validation data, predicts its temperature development with satisfactory accuracy. By simplification of the system through a number of sub-models, computational effort is significantly lowered. The reduced CFD model not only enables efficient thermal analysis of the coil assembly but also provides a practical approach for broader use in system design and optimization, where fast and reliable thermal predictions are essential.

This paper presents the development of a compact nanopositioning stage with long-range capabilities and six-degree-of-freedom (DOF) closed-loop control. The system, referred to as NPS6D100, provides Ø100 mm planar and 10 mm vertical travel range while maintaining direct force transfer to the moving platform (or slider) in all DOFs. Based on an integrated planar direct drive concept, the system is enhanced by precise vertical actuation and full 6D output feedback control. The mechanical structure, drive architecture, guiding, and measurement subsystems are described in detail, along with experimental results that confirm sub-10 nm servo errors under constant setpoint operation and in synchronized multi-axis motion scenarios. With its scalable and low-disturbance design, the NPS6D100 is well suited as a nanopositioning platform for sub-10 nm applications in nanoscience and precision metrology.