Spectral confocal displacement sensors are non-contact optoelectronic sensors widely utilized for their high accuracy, speed, and ability to measure diverse surfaces. However, challenges including vibration, angular deflection, and surface quality variations can reduce sensor stability and accuracy when performing measurements such as lithium battery wafer thickness, wafer warpage, and optical component surface topography. This study proposes a line-spot-based measurement method using a binary diffractive lens and cylindrical lens with a 20× objective, and then the overall structure is simulated and optimized by using ZEMAX, which realizes a confocal measurement system with a measurement range of 800 μm, line spot length of 3.8 mm, and width of 0.2 mm. The system, calibrated with a nanometer displacement stage, achieved 30 nm resolution and significantly improved dynamic stability (standard deviation (SD) of 0.013 μm) compared to a point spectral confocal sensor (SD of 0.064 μm). The results indicate the proposed sensor exhibits improved stability during scanning measurements.

Dielectric elastomer actuators (DEAs) are emerging as promising candidates for various applications in robotics and optical devices due to their lightweight, miniaturization potential, high energy density, simple structure, and low power consumption. However, their effective actuation always demands sophisticated high-voltage driving circuits that are compact and responsive. DEAs need to be capable of generating intricate high-voltage waveforms or simultaneously controlling multiple quadrants with distinct high-voltage levels. This paper proposes a high-voltage power supply for DEAs, featuring a four-quadrant high-voltage driving circuit. The circuit is capable of independently generating high-voltage signals ranging from 100 V to 6000 V and producing arbitrary waveforms with adjustable frequencies. The independent operation of the quadrants without crosstalk showcases the system’s integration and potential for cross-disciplinary applications.

Dielectric Elastomer Actuators (DEAs) are emerging as promising candidates for various applica-tions in robotics and optical devices due to their lightweight, miniaturization potential, high en-ergy density, simple structure, and low power consumption. However, their effective actuation always demands sophisticated high-voltage driving circuits that are compact and responsive. DEAs need to be capable of generating intricate high-voltage waveforms or simultaneously con-trolling multiple channels with distinct high-voltage levels. This paper proposes a high-voltage power supply for DEAs, featuring a four-channel high-voltage driving circuit. The circuit is ca-pable of independently generating high-voltage signals ranging from 100 V to 6000 V and can be programmed to produce arbitrary waveforms with adjustable frequencies. The independent op-eration of channels without crosstalk showcases the system's integration and potential for cross-disciplinary applications.