This treatise studies a microoptoelectromechanical accelerometer (MOEMA) with an optical measuring transducer built according to the optical tunneling principle (evanescent coupling). The work discusses the design of the accelerometer’s microelectromechanical sensing element (MSE) and states the requirements for the design to achieve a sensitivity threshold of 1 µg m/s² at a calculated eigenvalue of the MSE. The studies cover the selection of the dimensions, mass, eigenfrequency and corresponding stiffness of the spring suspension, gravity-induced cross-displacements. The authors propose and experimentally test an optical transducer positioning system represented by a capacitive actuator. This approach allows avoiding the restrictions in the fabrication of the transducer conditioned by the extremely high aspect ratio of deep silicon etching (more than 100). The designed MOEMA is tested on three manufactured prototypes. The experiments show that the sensitivity threshold of the accelerometers is 2 µg. For the dynamic range from minus 0.01 g to plus 0.01 g, the average nonlinearity of the accelerometers’ characteristics ranges from 0.7% to 1.62%. For the maximum dynamic range from minus 0.015 g to plus 0.05 g, the nonlinearity ranges from 2.34% to 2.9%, having the maximum deviation at the edges of the regions. The power gain of the three prototypes of accelerometers varies from 12.321 mW/g to 26.472 mW/g. The results provide broad prospects for the application of the proposed solutions in integrated inertial devices.

Compensation for the nonlinear diffraction of narrow laser beams with wavelengths of 532 and 633nm and the formation of photonic waveguides and waveguide circuits due to the contribution of...

Subject of study. An electro-optic modulator in a Mach–Zehnder interferometer configuration based on ridge waveguides made of a thin lithium niobate film was studied. Aim of study. The study aimed to mathematically model the parameters of an electro-optic modulator in a Mach–Zehnder interferometer configuration based on ridge waveguides made of a thin lithium niobate film. Method. The dependence of the optical losses introduced by a Y-branch splitter on the angle of the splitter was investigated using a beam propagation method based on the fast Fourier transform. Main results. The results of mathematical simulation of the parameters of the electro-optic modulator in the Mach–Zehnder interferometer configuration based on thin lithium niobate films were presented. The dependence of the optical losses, introduced by the Y-splitter, on the waveguide separation angle was obtained. Images of interference patterns occurring in the output waveguide were examined. A comparison revealed that the effectiveness of the proposed interferometer configuration was higher than that of the alternative solutions available in the literature. The novelty of the results is that the configuration of the electro-optic modulator investigated in this study was fabricated in the form of an integrated optical circuit based on ridge waveguides of thin-film lithium niobate. Such a solution enables a reduction in the dimensions of the final device and increases the sensitivity compared with that of existing analogs based on bulk electro-optic crystals. Additionally, owing to the use of a semiconductor substrate, an electronic circuit can possibly be integrated into the substrate, which enables the implementation of an electro-optic sensor system on a single chip. Practical significance. The method for interference pattern analysis proposed in this study provides information on the magnitude of the voltage applied to the arm of the interferometer and enables the development of requirements for its further modernization for increasing the accuracy of measurements and developing optoelectronic devices based on thin lithium niobate films, including integrated optical electric-field sensors.

LiNbO₃ plays a significant role in modern integrated photonics because of its unique properties. One of the challenges in modern integrated photonics is reducing chip production cost. Today, the most widespread yet expensive method to fabricate thin films of LiNbO₃ is the smart cut method. The high production cost of smart-cut chips is caused by the use of expensive equipment for helium implantation. A prospective method to reduce the cost of photonic integrated circuits is to use sputtered thin films of lithium niobite, since sputtering technology does not require helium implantation equipment. The purpose of this review is to assess the feasibility of applying sputtered LiNbO₃ thin films in integrated photonics. This work compares sputtered LiNbO₃ thin films and those fabricated by widespread methods, including the smart cut method, liquid-phase epitaxy, chemical vapor deposition, pulsed laser deposition, and molecular-beam epitaxy.

The transformations of the transverse profiles of laser beams in a nonlinear Fabry-Perot interferometer based on lithium niobate crystals with a surface layer doped with a combination of...

The generation of two-dimensional bright spatial soliton sets in lithium niobate sample has been experimentally demonstrated at light wavelength of 532 nm, contribution of pyroelectric effect into nonlinear optical response of the crystal, and spatial modulation of one-dimensional beam along direction normal to the crystal optical axis. Diameters of soliton beams and channel waveguides formed within the crystal bulk by these solitons are near to 20 μm at light polarization corresponding to extraordinary wave of the crystal.