This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual resonance peak behavior with the fundamental peak at the intended frequency. This design has the features of high energy conversion efficiency in a miniaturized environment where the available vibrational energy varies in frequency. It makes such a design suitable for future large volume production of integrated self powered sensors nodes for the Internet-of-Things.

From 2007 in US and from 2022 in EU it is mandatory to use TPMS monitoring in new cars. Sensors mounted in tires require a continuous power supply, which currently only is from batteries. Piezoelectric energy harvesting is a promising technology to harvest energy from tire movement and deformation to prolong usage of batteries and even avoid them inside tires.

In this paper, we explore the benefits of using a magnetostrictive component in a variable reluctance energy harvester. The intrinsic magnetic field bias and the possibility to utilize magnetic force to achieve pre-stress leads to a synergetic combination between this type of energy harvester and magnetostriction. The proposed energy harvester system, to evaluate the concept, consists of a magnetostrictive cantilever beam with a cubic magnet as proof mass. Galfenol, Fe_81.6Ga_18.4, is used to implement magnetostriction. Variable reluctance is achieved by fixing the beam parallel to an iron core, with some margin to create an air gap between the tip magnet and core. The mechanical forces of the beam and the magnetic forces lead to a displaced equilibrium position of the beam and thus a pre-stress. Two configurations of the energy harvester were evaluated and compared. The initial configuration uses a simple beam of aluminum substrate and a layer of galfenol with an additional magnet fixing the beam to the core. The modified design reduces the magnetic field bias in the galfenol by replacing approximately half of the length of galfenol with aluminum and adds a layer of soft magnetic material above the galfenol to further reduce the magnetic field bias. The initial system was found to magnetically saturate the galfenol at equilibrium. This provided the opportunity to compare two equivalent systems, with and without a significant magnetostrictive effect on the output voltage. The resonance frequency tuning capability, from modifying the initial distance of the air gap, is shown to be maintained for the modified configuration (140 Hz/mm), while achieving RMS open-circuit coil voltages larger by a factor of two (2.4 V compared to 1.1 V). For a theoretically optimal load, the RMS power was simulated to be 5.1 mW. Given the size of the energy harvester (18.5 cm³) and the excitation acceleration (0.5 g), this results in a performance metric of 1.1 mW/cm³g².

In this paper, we extend the optimization analysis found in the current literature for single-degree-of-freedom vibrational energy harvesters. We numerically derive and analyze the optimization conditions based on unified expressions for piezoelectric and electromagnetic energy harvesters. Our contribution lies in the detailed analysis and comparison of both resonant and anti-resonant states while fully including the effect of intrinsic resistance. We include both the case of excitation by inertial load and prescribed displacement, as the latter has not been elaborated on in the previous literature and provides new insights. We perform a general analysis but also consider typical values of applied piezoelectric and electromagnetic energy harvesters. Our results improve upon previous similar comparative studies by providing new and useful insights regarding optimal load, load power and power input to output efficiency. Our analysis shows an exponential increase in the critical mechanical quality factor due to the resistive loss coefficient. We find that the ratio of mechanical quality factor to resistive loss coefficient, at resonance, increases drastically close to the theoretical maximum for load power. Under the same optimization conditions, an equivalent conclusion can be drawn regarding efficiency. We find that the efficiency at anti-resonance behaves differently and is equal to or larger than the efficiency at resonance. We also show that the optimal load coefficient at resonance has a significant dependence on the mechanical quality factor only when the resistive loss coefficient is large. Our comparison of excitation types supports the previous literature, in a simple and intuitive way, regarding optimal load by impedance matching and power output efficiency. Our modeling and exploration of new parameter spaces provide an improved tool to aid the development of new harvester prototypes.

The quality factor of a packaged MEMS resonating structure depends on both the packaging pressure and the structure's proximity to the walls. This type of mechanical constraints, which causes energy dissipation from the structure to the surrounding air, are applicable for oscillating energy harvesters and should be considered in the design process. However, the modelling of energy losses or the measurements of their direct influence inside a packaged chip is not trivial. In this paper, a simple experimental method to quantify the energy loss in an oscillating MEMS structures due to the surrounding air is described together with preliminary results. The main advantage of the method is the ability to characterize the damping contributions under different vacuum and packaging conditions without requiring any packaging of the harvester chip or fabrication of multiple devices with different cavity depths.