Shijin Yan

Ms. Shijin Yan


Research Focus & Metrics

Academic Career Length

2Years (2025-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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28 April 2025 in Micromachines
Verified
Journal Article
Open access
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HLHao Fengchao Li
Hao Fengchao Li
SYShijin Yan
Shijin Yan
CLCheng Lei
Cheng Lei
DWDandan Wang
Dandan Wang
XWXi Wei
Xi Wei
TLTing Liang
Ting Liang
This paper presents a novel silicon-based piezoresistive pressure sensor composed of a silicon layer with sensing elements and a glass cover for hermetic packaging. Unlike conventional designs, this study employs numerical simulation to analyze the influence of varying roughness levels of the sensitive membrane on the sensor’s output response. Simulation results demonstrate that pressure sensors with smoother sensitive membranes exhibit superior performance in terms of sensitivity (5.07 mV/V/MPa), linearity (0.67% FS), hysteresis (0.88% FS), and repeatability (0.75% FS). Furthermore, an optimized process for controlling membrane roughness was achieved by adjusting the concentration of the etchant solution. Experimental results reveal that a membrane roughness of 35.37 nm was attained under conditions of 80 °C and 25 wt% TMAH. Additionally, the fabrication process of this piezoresistive pressure sensor was significantly simplified and cost-effective due to the adoption of a backside wet etching technique. The fabricated sensor demonstrates excellent performance metrics, including a sensitivity of 5.07 mV/V/MPa, a full-scale (FS) output of 101.42 mV, a hysteresis of 0.88% FS, a repeatability of 0.75% FS, and a nonlinearity of 0.67% FS. These results indicate that the proposed sensor is a promising tool for precise pressure measurement applications, offering both high performance and cost efficiency. This study not only advances the understanding of the impact of membrane roughness on sensor performance but also provides a practical and scalable fabrication approach for piezoresistive pressure sensors.