Slow tool servo (STS) assisted ultra-precision diamond turning is considered as a promising machining process with high accuracy and low cost to generate the large-area micro lens arrays (MLAs) on the roller mold. However, the chatter mark is obvious at the cut-in part of every machined micro lens along the cutting direction, which is a common problem for the generation of MLAs using STS. In this study, a novel forming approach based on STS is presented to fabricate MLAs on the aluminum alloy (6061) roller mold, which is a high-efficiency machining approach in comparison to a traditional method based on STS. Based on the different distribution patterns of the discrete point of micro lens, the equal-arc method and the equal-angle method are also proposed to generate the tool path. According to a kinematic analysis of the cutting axis, the chatter mark results from the overlarge instantaneous acceleration oscillations of the cutting axis during STS diamond turning process of MLAs. Cutting parameters including the number of discrete points and cutting time of every discrete point have been experimentally investigated to reduce the chatter mark. Finally, typical MLAs (20.52-μm height and 700-μm aperture) is successfully machined with the optimal cutting parameters. The results are acquired with a fine surface quality, i.e., form error of micro lenses is 0.632 μm, which validate the feasibility of the new machining method.

Vibration-assisted cutting is an important technology with better performance in manufacturing micro-scaled components, compared with conventional cutting technology. This article first illustrates the development of vibration-assisted micro-milling device which is made based on piezoelectric plates and shows different vibration types with vibration principle of this device. It is then tested stable to output vibration with a frequency accuracy of 100 Hz and an amplitude accuracy of 100 nm. Two groups of experiments in micro-milling 6061 aluminum alloy are carried out. Compared with conventional micro-milling, using vibration assist is verified more effective in improving surface integrity and quality. Furthermore, with a proposed method of characterizing exit-burr size, the influences of vibration frequency and amplitude on surface roughness and exit-burr size are discussed. As a result, the mean surface roughness is found positive related to vibration frequency and negative related to vibration amplitude in most of the study range. To make guidance on optimizing vibration machining parameters, cubic polynomial fitting with 95% prediction interval is of enough accuracy.

In this study, minimum quantity coolant/lubrication (MQCL) is found to have significant impact on the surface quality and mechanical properties of the micromilled thin-walled work piece that is the core component of an aeroaccelerometer. Three kinds of coolants were used in the micromilling process to analyze their effects on surface quality and mechanical properties of the component. The experiment results show that an appropriate dynamic viscosity of coolant helps to improve surface roughness. The high evaporation rate of the coolants can enhance the cooling performance. Comparing with the dry machining case, MQCL has better performance on improving tool wear, surface quality, and mechanical properties of the micromilled work piece. It yielded up to 1.4–10.4% lower surface roughness compared with the dry machining case in this experiment. The machined work piece with the best mechanical properties and the one with the worst mechanical properties appeared in the ethyl alcohol and the dry machining case, respectively. The reasons for deteriorating surface quality and mechanical properties in dry machining cases are also analyzed. For improving the micromilling process, the penetration and cooling effect of the coolants are more important. This paper gives references to obtain better service performance of the component by improving the micromilling process.

Microstrutured surfaces can be manufactured by roll-to-roll process with roller mold in a high precision and high efficient way. The roller mold machined by drum roll lathe has a large cutting area and takes long time, and thus, the machining precision of roller mold is very sensitive to the thermal error of machine tool. This study analyzes the influence of thermal error on the machining horizontal grooves array on roller mold and proposed a processing method to improve the machining precision. First, the thermal error of hydrostatic guideways system in drum roll lathe was analyzed by simulation and measured through experiments, respectively. Given the diamond tool position offset caused by thermal error, the pitch error of horizontal grooves array with sequential cutting method was discussed. And then, multi-divisions cutting method is proposed to average the pitch error to multiple horizontal grooves instead of cumulative error in the seam position of horizontal grooves array, compared with sequential cutting method. Finally, the experiments with Four Divisions Method were carried out to verify the validity of multi-divisions cutting method. The experimental results demonstrate that multi-divisions cutting method can considerably improve the machining precision of horizontal grooves array.