Microcantilevers were first introduced as imaging probes in Atomic Force Microscopy (AFM) due to their extremely high sensitivity in measuring surface forces. The versatility of these probes, however, allows the sensing and measurement of a host of mechanical properties of various materials. Sensor parameters such as resonance frequency, quality factor, amplitude of vibration and bending due to a differential stress can all be simultaneously determined for a cantilever. When measuring the mechanical properties of materials, identifying and discerning the most influential parameters responsible for the observed changes in the cantilever response are important. We will, therefore, discuss the effects of various force fields such as those induced by mass loading, residual stress, internal friction of the material, and other changes in the mechanical properties of the microcantilevers. Methods to measure variations in temperature, pressure, or molecular adsorption of water molecules are also discussed. Often these effects occur simultaneously, increasing the number of parameters that need to be concurrently measured to ensure the reliability of the sensors. We therefore systematically investigate the geometric and environmental effects on cantilever measurements including the chemical nature of the underlying interactions. To address the geometric effects we have considered cantilevers with a rectangular or circular cross section. The chemical nature is addressed by using cantilevers fabricated with metals and/or dielectrics. Selective chemical etching, swelling or changes in Young’s modulus of the surface were investigated by means of polymeric and inorganic coatings. Finally to address the effect of the environment in which the cantilever operates, the Knudsen number was determined to characterize the molecule-cantilever collisions. Also bimaterial cantilevers with high thermal sensitivity were used to discern the effect of temperature variations. When appropriate, we use continuum mechanics, which is justified according to the ratio between the cantilever thickness and the grain size of the materials. We will also address other potential applications such as the ageing process of nuclear materials, building materials, and optical fibers, which can be investigated by monitoring their mechanical changes with time. In summary, by virtue of the dynamic response of a miniaturized cantilever shaped material, we present useful measurements of the associated elastic properties.

Local temperature inhomogeneities in systems containing micron and submicron objects can result in unexpected consequences. If the mean free path of the host gas constituents is comparable to a characteristic length of the system, then a net exchange of momentum occurs between the constituents and the involved surfaces. For a given temperature gradient and a given pressure range, this results in the presence of Knudsen and Knudsen-like forces (KF). The pressure dependence of these forces has been studied using a microelectromechanical system composed of a microcantilever near a substrate surface. Nano-Newton scale KF are observed by the bending of the microcantilever as monitored by the charge variation on the microcantilever-substrate assembly in a capacitive mode.

Microcantilevers revealed anomalous interfacial stress generated during sodiation/desodiation in 2D MoS ₂ .

Experimental results are presented for light-on-light modulation at low rates using coupling to nonradiative surface plasmons and their associated thermal effects in a thin gold foil. It is first shown that several modulated Gaussian beams simultaneously exciting surface plasmons in the same region of a thin gold film, will result in a coupling that is revealed in the reflected beams. The observed effects result in the reflected beams undergoing changes in both spatial distribution and intensity levels. A brief study is then presented of the coupling between surface plasmons and an electrical current in the excitation region to further support the role of the surface plasmon induced thermal processes in the gold foil.

Tracking the uptake of nanomaterials by living cells is an important component in assessing both potential toxicity and in designing future materials for use in vivo. We show that the difference in the local elasticity at the site of silica (SiO2) nanoparticles confined within a macrophage enables functional ultrasonic interactions. By elastically exciting the cell, a phase perturbation caused by the buried SiO2 nanoparticles was detected and used to map the subsurface populations of nanoparticles. Localization and mapping of stiff chemically synthesized silica nanoparticles within the cellular structures of a macrophage are important in basic as well as applied studies.