Magnetic shape memory alloys exhibit various multifunctional properties, which range from high stroke actuation and magnetocaloric refrigeration to thermomagnetic energy harvesting. Most of these applications benefit from miniaturization and a single crystalline state. Epitaxial film growth is so far only possible on some oxidic substrates, but they are expensive and incompatible with standard microsystem technologies. Here, epitaxial growth of Ni–Mn–based Heusler alloys with single crystal‐like properties on silicon substrates is demonstrated by using a SrTiO₃ buffer. It is shown that this allows using standard microfabrication technologies to prepare partly freestanding patterns. This approach is versatile, as its applicability for the NiTi shape memory alloy is demonstrated and spintronic and thermoelectric Heusler alloys are discussed. This paves the way for integrating additional multifunctional effects into state‐of‐the‐art microelectronic and micromechanical technology, which is based on silicon.

This work investigates the role of grain size and recrystallization texture in the corrosion behavior of pure iron in 0.1 M sulfuric acid solution. Annealing heat treatment was applied to obtain samples with different average grain sizes (26, 53 and 87 µm). Optical microscopy, X-ray diffraction and electron backscatter diffraction techniques were used to characterize the microstructure. The EBSD data analysis showed ferrite phase with no inclusions and very low geometrically necessary dislocation density, indicating strain-free grains constituting all samples. The crystallographic texture analysis of the samples revealed that the 26 µm grain size sample had a high volume fraction of {111} oriented grains parallel to the sample surface, while other samples exhibited nearly random crystallographic texture. The electrochemical results from potentiodynamic polarization and electrochemical impedance spectroscopy showed a decrease in corrosion resistance from 87 µm to 53 µm grain size sample and then an increase for the 26 µm grain size sample. This increase was attributed to the dominant effect of recrystallization texture on the corrosion behavior of the sample. The cathodic hydrogen evolution reaction kinetics was found to play a decisive role in the corrosion behavior of iron.

Magnetic shape memory alloys are emerging multifunctional materials that enable applications like high‐stroke actuation, solid‐state refrigeration, and energy harvesting of waste heat. Thin films of these alloys promise integration in microsystems to exploit their multifunctional properties at the microscale. However, the microfabrication process of these Heusler alloys is difficult. Herein, different etching techniques are investigated for the microfabrication of epitaxial Ni‐Mn‐Ga films, the encountered challenges are explained, and ways to overcome them are demonstrated. The results show that wet chemical etching is suitable for large patterned structures, while reactive ion etching of Ni‐Mn‐Ga films is unsuitable due to redeposition. For patterning structures below 10 μm with clean and sharp edges, the best results are obtained by ion beam etching with adjusted sample‐stage tilt. Finally, a microfabrication process using Si microtechnology to fabricate partially freestanding structures is demonstrated. These findings give guidelines for the fabrication and integration of these smart materials in Si‐based microsystems.