Polymer materials exhibit unique properties in the fabrication of optical waveguide devices, electromagnetic devices, and bio-devices. Direct laser writing (DLW) technology is widely used for micro-structure fabrication due to its high processing precision, low cost, and no need for mask exposure. This paper reviews the latest research progresses of polymer-based micro/nano-devices fabricated using the DLW technique as well as their applications. In order to realize various device structures and functions, different manufacture parameters of DLW systems are adopted, which are also investigated in this work. The flexible use of the DLW process in various polymer-based microstructures, including optical, electronic, magnetic, and biomedical devices are reviewed together with their applications. In addition, polymer materials which are developed with unique properties for the use of DLW technology are also discussed.

Polymers are promising materials for fabricating photonic integrated waveguide devices. Versatile functional devices can be manufactured using a simple process, with low cost and potential mass-manufacturing. This paper reviews the recent progress of polymer photonic integrated devices fabricated using the UV imprinting technique. The passive polymer waveguide devices for wavelength filtering, power splitting, and light collecting, and the active polymer waveguide devices based on the thermal-optic tuning effect, are introduced. Then, the electro-optic (EO) modulators, by virtue of the high EO coefficient of polymers, are described. Finally, the photonic biosensors, which are based on low-cost and biocompatible polymer platforms, are presented.

A refractive index sensor based on bimodal waveguide interferometer is demonstrated on the low-cost polymer platform for the first time. Different from conventional interferometers which make use of the interference between the light from two arms, bimodal waveguide interferometers utilize the interference between the two different internal modes in the waveguide. Since the utilized first higher mode has a wide evanescent tail which interacts with the external environment, the interferometer can reach a high sensitivity. Instead of vertical bimodal structure which is normally employed, the lateral bimodal waveguide is adopted in order to simplify the fabrication process. An unique offset between the centers of single mode waveguide and bimodal waveguide is designed to excite the two different modes with equal power which contributes to the maximum fringe visibility. The bimodal waveguide interferometer is finally fabricated on optical polymer (Ormocore) which is transparent at both infrared and visible wavelengths. It is fabricated using the UV-based soft imprint technique which is simple and reproductive. The bulk sensitivity of fabricated interferometer sensor with a 5 mm sensing length is characterized using different mass concentration sodium chloride solutions. The sensitivity is obtained as 316 Πrad/RIU and the extinction ratio can reaches 18 dB.

Polymer-based single-microring biosensors usually have a small free spectral range (FSR) that hampers the tracing of the spectrum shifting in the measurement. A cascade of two microring resonators based on the Vernier effect, is applied in this article in order to make up for this defect. A small FSR difference between the reference microring and the sensing microring is designed, in order to superpose the periodic envelope signal onto the constituent peaks, which makes it possible to continuously track the spectrum of the sensor. The optical polymer material, Ormocore, which has a large transparent window, is used in the fabrication. The biosensor is fabricated by using an UV-based soft imprint technique, which is considered to be cost-effective and suitable for mass production. By optimizing the volume ratio of Ormocore and the maT thinner, the device can be fabricated almost without a residual layer. The device works at a wavelength of 840 nm, where water absorption loss is much lower than at the infrared wavelengths. A two-step fitting method, including single-peak fitting and whole-envelope fitting, is applied in order to trace the spectral shift accurately. Finally, the two-cascaded-microrings biosensor is characterized, and the obtained FSR is 4.6 nm, which is 16 times larger than the FSR of the single microring biosensor demonstrated in our previous work. Moreover, the sensitivity can also be amplified by 16-fold, thanks to the Vernier effect.

Silicon nitride (Si3N4) photonic integrated circuits are rapidly developing in recent decades. The low loss of Si3N4 attracts significant attention and facilitates a wide range of applications in integrated photonics. In this work, we demonstrate the foundry fabrication of a 300-nm-thick 8-in. wafer-scale Si3N4 platform, with a microresonator intrinsic quality factor of up to 15×106, corresponding to an ultralow loss of 2.2 dB/m. Leveraging this platform, we develop a mature process design kit, achieving a single-mode waveguide propagation loss of less than 5 dB/m, an edge coupler loss of 1.3 dB, and an insertion loss of 0.07 dB for multimode interference couplers. Utilizing the processed Si3N4 chip, we realize a hybrid integrated tunable external cavity laser with a tuning range from 1534 to 1602 nm, a record-high side-mode suppression ratio of up to 76 dB, an optical power of 26 mW, and an intrinsic linewidth of down to 314 Hz. Our work lays a solid foundation for the further development of applications, including nonlinear optics, quantum optics, optical communications, and ranging.

A microring resonator with the multimode interference coupler is fabricated on the polymer platform by using UV-based soft nanoimprint technique. A unique class of fluorinated polymer, perfluoropolyether (PFPE), is employed for the fabrication of the flexible soft mold. By optimizing the proportion between Ormocore and the thinner maT, the microring resonator is fabricated almost without residual layer. The fabricated device with a Q-factor up to 2.3 × 10⁴ is demonstrated for very-near-infrared wavelengths, which shows high potential for sensing applications.