This study presents a new microelectromechanical system, a vibration ring gyroscope with a double U-beam (DUVRG), which was designed using a combination of mathematical analysis and the finite element method. First, a ring vibration resonator with eight double U-beam structures was developed, and 24 capacitive electrodes were designed for drive and sense according to the advantageous characteristics of a thin-shell vibrating gyroscope. Then, based on the elastic mechanics and thin-shell theory, a mathematical stiffness model of the double U-beam was established. The maximum mode resonant frequency error calculated by the DUVRG stiffness model, finite element analysis (FEA) and experiments was 0.04%. DUVRG structures were manufactured by an efficient fabrication process using silicon-on-glass (SOG) and deep reactive ion etching (DRIE), and the FEA value and theoretical calculation had differences of 5.33% and 5.36% with the measured resonant frequency value, respectively. Finally, the static and dynamic performance of the fabricated DUVRG was tested, and the bias instability and angular random walk were less than 8.86 (°)/h and 0.776 (°)/√h, respectively.

This paper focuses on an optimal quadrature error correction method for the dual-mass MEMS gyroscope, in order to reduce the long term bias drift. It is known that the coupling stiffness and demodulation error are important elements causing bias drift. The coupling stiffness in dual-mass structures is analyzed. The experiment proves that the left and right masses’ quadrature errors are different, and the quadrature correction system should be arranged independently. The process leading to quadrature error is proposed, and the Charge Injecting Correction (CIC), Quadrature Force Correction (QFC) and Coupling Stiffness Correction (CSC) methods are introduced. The correction objects of these three methods are the quadrature error signal, force and the coupling stiffness, respectively. The three methods are investigated through control theory analysis, model simulation and circuit experiments, and the results support the theoretical analysis. The bias stability results based on CIC, QFC and CSC are 48 °/h, 9.9 °/h and 3.7 °/h, respectively, and this value is 38 °/h before quadrature error correction. The CSC method is proved to be the better method for quadrature correction, and it improves the Angle Random Walking (ARW) value, increasing it from 0.66 °/√h to 0.21 °/√h. The CSC system general test results show that it works well across the full temperature range, and the bias stabilities of the six groups’ output data are 3.8 °/h, 3.6 °/h, 3.4 °/h, 3.1 °/h, 3.0 °/h and 4.2 °/h, respectively, which proves the system has excellent repeatability.

High-G accelerometers are mainly used for motion measurement in some special fields, such as projectile penetration and aerospace equipment. This paper mainly explores the wavelet threshold denoising and wavelet packet threshold denoising in wavelet analysis, which is more suitable for high-G piezoresistive accelerometers. In this paper, adaptive decomposition and Shannon entropy criterion are used to find the optimal decomposition layer and optimal tree. Both methods use the Stein unbiased likelihood estimation method for soft threshold denoising. Through numerical simulation and Machete hammer test, the wavelet threshold denoising is more suitable for the dynamic calibration of a high-G accelerometer. The wavelet packet threshold denoising is more suitable for the parameter extraction of the oscillation phase.

High-G MEMS accelerometers have been widely used in monitoring natural disasters and other fields. In order to improve the performance of High-G MEMS accelerometers, a denoising method based on the combination of empirical mode decomposition (EMD) and wavelet threshold is proposed. Firstly, EMD decomposition is performed on the output of the main accelerometer to obtain the intrinsic mode function (IMF). Then, the continuous mean square error rule is used to find energy cut-off point, and then the corresponding high frequency IMF component is denoised by wavelet threshold. Finally, the processed high-frequency IMF component is superposed with the low-frequency IMF component, and the reconstructed signal is denoised signal. Experimental results show that this method integrates the advantages of EMD and wavelet threshold and can retain useful signals to the maximum extent. The impact peak and vibration characteristics are 0.003% and 0.135% of the original signal, respectively, and it reduces the noise of the original signal by 96%.

With the rapid advancements in inertial technology and Micro-Electro-Mechanical System (MEMS) fabrication, MEMS gyroscopes have gained widespread use across various industries. To address the problems of bad temperature stability and high noise in MEMS gyroscopes, this paper proposes a novel fusion algorithm based on the double U-beam vibration ring gyroscope (DUVRG), which incorporates temperature compensation and noise suppression. The proposed algorithm constructs a gyro temperature error model using a signal extraction method based on quantized temperature. Noise suppression is achieved by integrating a Kalman filter (KF) and a statistical calibration filter (SCF) based on an adaptive sliding window (ASW). After three sets of temperature experiments with different temperature change rates, the compensated experimental results show that the gyro angular random walk (ARW) is reduced to 0.58°/√h and the bias instability (BI) is reduced to 1.10°/h in the range of -40°C to 60°C. Compared with the original signals, the ARW and BI are reduced by 71.8% and 98.8%, respectively. The proposed novel temperature compensation and noise suppression method effectively enhances the temperature stability and noise performance of the gyroscope. Furthermore, this fusion algorithm requires less computational resources and satisfies the requirements of real-time signal processing, distinguishing it from conventional algorithms.

In this paper, the method for compensating the temperature drift of high-G MEMS accelerometer (HGMA) is proposed, including radial basis function neural network (RBF NN), RBF NN based on genetic algorithm (GA), RBF NN based on GA with Kalman filter (KF), and the RBF NN + GA + KF method compensated by the temperature drift model. First, this paper introduces an HGMA structure working principle, conducts a finite element analysis, and produces the results. The simulation results show that the HGMA working mode is the 1st order mode, and its resonant frequency is 408 kHz. The 2nd order mode resonant frequency is 667 kHz, and the gap with the first mode is 260 kHz, indicating that the coupling movement between the two modes is tiny, so the HGMA has good linearity. Then, a temperature experiment is performed to obtain the output value of HGMA. The output values of HGMA are analyzed and optimized by using the algorithms proposed in this paper. The processing results show that the RBF NN + GA + KF method compensated by the temperature drift model achieves the best denoing consequent. The processing results show that the temperature drift of the HGMA is effectively compensated. The final results show that acceleration random walking improved from 17130 g/h/Hz^0.5 to 765.3 g/h/Hz^0.5, and bias stability improved from 4720 g/h to 57.27 g/h, respectively. The results show that after using the RBF NN + GA + KF method, combined with the temperature drift model, the temperature drift trend and noise characteristics of HGMA are well optimized.