In this paper, we propose a measurement method of micro-optical elements with parallel phase-shifting digital holographic phase imaging. This method can record four phase-shifting holograms with a phase difference of π/2 in a single shot and correct the pixel mismatch error of the polarization camera using a bilinear interpolation algorithm, thereby producing high-resolution four-step phase-shifting holograms. This method reconstructs the real phase information of the object to be measured through a four-step phase-shifting algorithm. The reproduced image eliminates the interference of zero-order images and conjugate images, overcoming the problem that traditional phase-shifting digital holography cannot be measured in real time. A simulation analysis showed that the relative error of this measurement method could reach 0.0051%. The accurate surface topography information of the object was reconstructed from an experimental measurement through a microlens array. Multiple measurements yielded a mean absolute error and a mean relative error for the vertical height of the microlens array down to 5.9500 nm and 0.0461%, respectively.

A novel preprocessing method based on a modified U-NET is proposed for single interference fringes. The framework is constructed by introducing spatial attention and channel attention modules to optimize performance. In this process, interferometric fringe maps with an added background intensity, fringe amplitude, and ambient noise are used as the input to the network, which outputs fringe maps in an ideal state. Simulated and experimental results demonstrated that this technique can preprocess single interference fringes in ~1 microsecond. The quality of the results was further evaluated using the root mean square error, peak signal-to-noise ratio, structural similarity, and equivalent number of views. The proposed method outperformed U-NET, U-NET++, and other conventional algorithms as measured by each of these metrics. In addition, the model produced high-quality normalized fringes by combining objective data with visual effects, significantly improving the accuracy of the phase solutions for single interference fringes.

The conjugate shift differential method, based on Fourier transforms, is critical for surface error testing of high-precision optical elements. However, this common approach is also prone to periodic spectrum loss. As such, this paper proposes conjugate double shift differential (CDSD) absolute testing, which can effectively compensate for spectrum loss and achieve accurate wavefront reconstructions. Spectrum loss in the single shift differential method is analyzed through a study of the Fourier reconstruction process. A calculation model for the proposed CDSD method is then established and constraint conditions for shift quantities are provided by analyzing double shear effects observed in transverse shear interference. Finally, the reconstruction accuracies of various spectrum compensation methods are compared. Results showed that spectrum loss became more evident with increasing shift amounts. However, the CDSD method produced the smallest measurement error compared with conventional direct zero filling and adjacent point averaging, suggesting our approach could effectively improve absolute shape measurement accuracy for planar optical elements.

Modern optical engineering requires increasingly sophisticated interferometry methods capable of conducting subnanometer scale measurements of the large aperture, high-precision optical component surfaces. However, the accuracy of interferometry measurement is limited to the accuracy with which the surface of the reference mirror employed in the interferometer system is known, and the influence of gravity-induced deformation cannot be ignored. This is addressed in the present work by proposing a three-flat testing method based on multiposition rotation interference absolute surface measurement technology that combines the basic theory of N-position rotation with the separability of surface wavefront functions into sums of even and odd functions. These functions provide the rotational symmetric components of the wavefront, which then enables the absolute surface to be reconstructed based on the N-position rotation measurements. In addition, we propose a mechanical clamping combined with computational method to compensate for the gravity-induced deformations of the flats in the multiposition rotation absolute measurements. The high precision of the proposed absolute surface measurement method is demonstrated via simulations. The results of laboratory experiments indicate that the combination compensation method provides the high-precision surface reconstruction outcomes. The present work provides an important contribution for supporting the interferometry measurement of large aperture, high-precision optical component surfaces.

This study proposes a novel wavelength-tuning common-path digital holographic microscopy technique for quantitative phase imaging of functional micro-optics components. The proposed technique is immune to vibration and can reduce system error. In the proposed configuration, a parallel glass plate was inserted into the light path to create two identical test beams, which passed through a specially designed window filter. In this process, one beam serves as the object beam, while the other is diffracted to produce an ideal spherical wave front (the reference beam). A wavelength tunable laser was used as the light source to generate phase-shifting digital holograms. Structural information for the functional micro-optics components was then extracted using a classical four-step phase-shift algorithm. The viability of the proposed technique was assessed by measuring a micro-optics array.

This paper proposes a real-time compensated pentaprism scanning wavefront detection method to achieve real-time compensation for scanning errors occurring during prism movement along a guide rail. The method is based on existing pentaprism scanning wavefront detection technology and it is realized by applying self-collimation-based three-dimensional error compensation. Using theoretical and data analyses of a detection experiment, the reliability of the optimized pentaprism scanning detection method is verified, thus effectively ensuring the reasonable estimation of the interferometry surface measurement uncertainty.