A major obstacle during the design of brain- computer interfaces is the unavailability of a neural implantable device that is μ-scale in size and is wireless, self-powered, and long-lasting. The current state-of-the-art implantable devices suffer from various limitations. Electromagnetic-based wireless devices are big in size because of their large antenna, which must be larger than one-tenth of the wavelength of the operational frequency. Ultrasound-based wireless devices, in addition to their low data rate, have massive loss in the skull and need an intermediate electromagnetic transceiver under the skull. Furthermore, almost all state-of-the-art wireless devices use micro-electrodes for neuronal recording, which are not reliable in long-term monitoring applications because of the direct contact between the tissue and metal electrodes. In this paper, we propose a novel, wireless, and ultra-compact implantable device termed NanoNeuroRFID. At the core of this device, there is a magnetoelectric (ME) antenna array. ME antennas are smart and ultra-miniaturized (<;200 μm diameter) and can perform multiple tasks. First, can harvest electromagnetic energy to power the NanoNeuroRFID system. Their limit of the detection for RF magnetic fields is 40 pT; second, they can sense quasi-static neuronal magnetic fields as small as 200 pT without direct contact to the tissue, allowing a long lifetime and reliable neural recording; and third, they can communicate with an external transceiver, and their operational frequency could be 10 to 100 s of MHz, where tissue loss is small.

The strong strain-mediated magnetoelectric (ME) coupling found in thin-film ME heterostructures has attracted an ever-increasing interest and enables realization of a great number of integrated multiferroic devices, such as magnetometers, mechanical antennas, RF tunable inductors and filters. This paper first reviews the thin-film characterization techniques for both piezoelectric and magnetostrictive thin films, which are crucial in determining the strength of the ME coupling. After that, the most recent progress on various integrated multiferroic devices based on thin-film ME heterostructures are presented. In particular, rapid development of thin-film ME magnetometers has been seen over the past few years. These ultra-sensitive magnetometers exhibit extremely low limit of detection (sub-pT/Hz^1/2) for low-frequency AC magnetic fields, making them potential candidates for applications of medical diagnostics. Other devices reviewed in this paper include acoustically actuated nanomechanical ME antennas with miniaturized size by 1–2 orders compared to the conventional antenna; integrated RF tunable inductors with a wide operation frequency range; integrated RF tunable bandpass filter with dual H- and E-field tunability. All these integrated multiferroic devices are compact, lightweight, power-efficient, and potentially integrable with current complementary metal oxide semiconductor (CMOS) technology, showing great promise for applications in future biomedical, wireless communication, and reconfigurable electronic systems.

Over the last two decades, piezoelectric resonant sensors based on micro-electromechanical systems (MEMS) technologies have been extensively studied as such sensors offer several unique benefits, such as small form factor, high sensitivity, low noise performance and fabrication compatibility with mainstream integrated circuit technologies. One key challenge for piezoelectric MEMS resonant sensors is enhancing their quality factors (Qs) to improve the resolution of these resonant sensors. Apart from sensing applications, large values of Qs are also demanded when using piezoelectric MEMS resonators to build high-frequency oscillators and radio frequency (RF) filters due to the fact that high-Q MEMS resonators favor lowering close-to-carrier phase noise in oscillators and sharpening roll-off characteristics in RF filters. Pursuant to boosting Q, it is essential to elucidate the dominant dissipation mechanisms that set the Q of the resonator. Based upon these insights on dissipation, Q-enhancement strategies can then be designed to target and suppress the identified dominant losses. This paper provides a comprehensive review of the substantial progress that has been made during the last two decades for dissipation analysis methods and Q-enhancement strategies of piezoelectric MEMS laterally vibrating resonators.

In recent years, wearable electronic devices have made considerable progress thanks to the rapid development of the Internet of Things. However, even though some of them have preliminarily achieved miniaturization and wearability, the drawbacks of frequent charging and physical rigidity of conventional lithium batteries, which are currently the most commonly used power source of wearable electronic devices, have become technical bottlenecks that need to be broken through urgently. In order to address the above challenges, the technology based on triboelectric effect, i.e., triboelectric nanogenerator (TENG), is proposed to harvest energy from ambient environment and considered as one of the most promising methods to integrate with functional electronic devices to form wearable self-powered microsystems. Benefited from excellent flexibility, high output performance, no materials limitation, and a quantitative relationship between environmental stimulation inputs and corresponding electrical outputs, TENGs present great advantages in wearable energy harvesting, active sensing, and driving actuators. Furthermore, combined with the superiorities of TENGs and fabrics, textile-based TENGs (T-TENGs) possess remarkable breathability and better non-planar surface adaptability, which are more conducive to the integrated wearable electronic devices and attract considerable attention. Herein, for the purpose of advancing the development of wearable electronic devices, this article reviews the recent development in materials for the construction of T-TENGs and methods for the enhancement of electrical output performance. More importantly, this article mainly focuses on the recent representative work, in which T-TENGs-based active sensors, T-TENGs-based self-driven actuators, and T-TENGs-based self-powered microsystems are studied. In addition, this paper summarizes the critical challenges and future opportunities of T-TENG-based wearable integrated microsystems.

We report the use of planar ring-shaped phononic crystals (PnCs) as anchor boundaries of very-high-frequency band piezoelectric-on-silicon Lamb mode resonators for the purpose of enhancing their quality factor (Q). Here, we exploit the acoustic bandgap associated with the PnC anchoring boundaries to reduce acoustic energy leakage out of the micromechanical resonator. The proposed approach provides greater mechanical robustness (by merit of interlocking the cells in a matrix) and the possibility of electrical routing through the PnC cells. We experimentally show enhancements in Q by a factor of three using the proposed approach of hybridizing planar ring-shaped PnCs with micromechanical resonators. The effect of these PnCs on resonator Q is further corroborated by their effects in suppressing transmission when incorporated into a delay line.