Ultra-compact wireless implantable medical devices are in great demand for healthcare applications, in particular for neural recording and stimulation. Current implantable technologies based on miniaturized micro-coils suffer from low wireless power transfer efficiency (PTE) and are not always compliant with the specific absorption rate imposed by the Federal Communications Commission. Moreover, current implantable devices are reliant on differential recording of voltage or current across space and require direct contact between electrode and tissue. Here, we show an ultra-compact dual-band smart nanoelectromechanical systems magnetoelectric (ME) antenna with a size of 250 × 174 µm² that can efficiently perform wireless energy harvesting and sense ultra-small magnetic fields. The proposed ME antenna has a wireless PTE 1–2 orders of magnitude higher than any other reported miniaturized micro-coil, allowing the wireless IMDs to be compliant with the SAR limit. Furthermore, the antenna’s magnetic field detectivity of 300–500 pT allows the IMDs to record neural magnetic fields.

Since the revival of multiferroic laminates with giant magnetoelectric (ME) coefficients, a variety of multifunctional ME devices, such as sensor, inductor, filter, antenna etc. have been developed. Magnetoelastic materials, which couple the magnetization and strain together, have recently attracted ever-increasing attention due to their key roles in ME applications. This review starts with a brief introduction to the early research efforts in the field of multiferroic materials and moves to the recent work on magnetoelectric coupling and their applications based on both bulk and thin-film materials. This is followed by sections summarizing historical works and solving the challenges specific to the fabrication and characterization of magnetoelastic materials with large magnetostriction constants. After presenting the magnetostrictive thin films and their static and dynamic properties, we review micro-electromechanical systems (MEMS) and bulk devices utilizing ME effect. Finally, some open questions and future application directions where the community could head for magnetoelastic materials will be discussed.

We report a highly sensitive NEMS DC/low frequency magnetic field sensor consisting of an AlN/FeGaB resonator, with a ΔE effect-based sensing principle. Unlike previously reported magnetic field detection schemes, such as observing induced magnetoelectric voltage, or monitoring impedance, we designed a system to directly measure the reflected output voltage from the sensor as a function of magnetic field. The AlN/FeGaB resonator shows a resonance frequency shift of 3.19 MHz (1.44%), which leads to a high DC magnetic field sensitivity of 2.8 Hz/nT and a limit of detection of 800pT in an unshielded, room temperature and pressure, lab environment.

A major obstacle during the design of brain- computer interfaces is the unavailability of a neural implantable device that is μ-scale in size and is wireless, self-powered, and long-lasting. The current state-of-the-art implantable devices suffer from various limitations. Electromagnetic-based wireless devices are big in size because of their large antenna, which must be larger than one-tenth of the wavelength of the operational frequency. Ultrasound-based wireless devices, in addition to their low data rate, have massive loss in the skull and need an intermediate electromagnetic transceiver under the skull. Furthermore, almost all state-of-the-art wireless devices use micro-electrodes for neuronal recording, which are not reliable in long-term monitoring applications because of the direct contact between the tissue and metal electrodes. In this paper, we propose a novel, wireless, and ultra-compact implantable device termed NanoNeuroRFID. At the core of this device, there is a magnetoelectric (ME) antenna array. ME antennas are smart and ultra-miniaturized (<;200 μm diameter) and can perform multiple tasks. First, can harvest electromagnetic energy to power the NanoNeuroRFID system. Their limit of the detection for RF magnetic fields is 40 pT; second, they can sense quasi-static neuronal magnetic fields as small as 200 pT without direct contact to the tissue, allowing a long lifetime and reliable neural recording; and third, they can communicate with an external transceiver, and their operational frequency could be 10 to 100 s of MHz, where tissue loss is small.

Layered magnetic/piezoelectric heterostructures have drawn a great amount of interest for their potential use in ultra-sensitive magnetoelectric (ME) sensors, ME antennas, voltage tunable inductors, magnetic tunable resonators, etc. It is critically important to characterize the saturation magnetostriction, piezomagnetic coefficient, ΔE effect, and magnetomechanical coupling factor of magnetic thin films, which determine the performance of these ME devices. In this work, a sensitive system has been developed to measure these magnetomechanical properties, on which several different magnetostrictive thin films on the silicon substrate cantilever were characterized. A 0.015 ppm limit of detection of the magnetostriction tester and a frequency resolution of 0.01 Hz of the ΔE tester have been achieved. After magnetic anneal treatment, a record high piezomagnetic coefficient of 12 ppm/Oe, a giant magnetic field induced Young's modulus change of 153 GPa, and a high effective magnetomechanical coupling factor of 0.84 have been measured in FeGaB thin films.