In this paper, we prepared a high-performance zinc oxide (ZnO) humidity sensor in an alkaline environment using one-step hydrothermal method. Experiments showed that the pH value of the precursor solution affects the performance of ZnO humidity sensors. There are abundant hydroxyl group and oxygen vacancies on the surface of ZnO with a precursor pH value of 10. Abundant hydroxyl groups on the surface of ZnO can adsorb a large number of water molecules and rich oxygen vacancies can accelerate the decomposition of water molecules, thus increasing the number of conductive ions (H₃O⁺) and further improving the performance of the sensor. So, such a ZnO humidity sensor exhibited high sensitivity (14,415), good linearity, small hysteresis (0.9%), fast response/recovery time (31/15 s) in the range from 11% to 95% relative humidity (RH). Moreover, the ZnO-2 humidity sensor has good repeatability and can be effectively used for a long time. This study provides a new idea for the development of low-cost, high-performance and reusable ZnO resistive humidity sensors.

Highly sensitive silver (Ag) modified zinc oxide (ZnO) humidity sensors were prepared by hydrothermal synthesis and the mechanism was studied. Experimental results show that Ag-modified ZnO can effectively enhance the performance of a humidity sensor. Large number of oxygen vacancies and many active sites are generated on the surface when molar ratio of Ag⁺ to Zn²⁺ is 1:100, which can accelerate the decomposition of water molecules on surface of the material, thereby improving the response of humidity sensor. Moreover, the linearity of ZnO humidity sensor is greatly improved by silver nanoparticles. Compared with previously reported ZnO-based humidity sensors, Ag/ZnO humidity sensors have a better response (151,700%), good linearity, low hysteresis (3%), and short response/recovery time (36/6 s). At the same time, it is found that the light had little effect on the performance of Ag/ZnO. Therefore, this kind of ZnO sensor with stable performance and excellent performance is expected to be used in the detection of relative humidity in conventional environments.