This paper looks at the design, fabrication and characterization of stackable microfluidic emulsion generators, with coefficients of variation as low as ~6% and with production rates as high as ~1 L h⁻¹. This work reports the highest throughput reported in the literature for a microfluidic device with simultaneous operation of liquid–liquid droplet generators. The device was achieved by stacking several layers of 128 flow-focusing droplet generators, organized in a circular array. These layers are interconnected via through-holes and fed with designated fractal distribution networks. The proposed layers were milled on poly(methylmethacrylate) (PMMA) sheets and the stack was thermo-compression bonded to create a three-dimensional device with a high density of generators and an integrated hydraulic manifold. The effect of stacking multiple layers was studied and the results show that fabrication accuracy has a greater impact on the dispersity of the emulsion than the addition of more layers to the stack. Particle crystallization of drugs was also demonstrated as a possible application of this technology in industry.

To achieve higher power output from a thermoelectric generator (TEG), one needs to maintain a larger temperature difference between hot and cold end. In that regard, a stretchable TEG can be interesting to adaptively control the temperature difference. Here we show, the development of simple yet versatile and highly stretchable thermoelectric generators (TEGs), by combining well-known inorganic thermoelectric materials Bismuth Telluride and Antimony Telluride (Bi2Te3 and Sb2Te3) with organic substrates (Off-Stoichiometry Thiol-Enes polymer platform – OSTE, polyimide or paper) and novel helical architecture (double-arm spirals) to achieve over 100% stretchability. First, an OSTE-based TEG design demonstrates higher open circuit voltage generation at 100% strain than at rest, although it exhibits high internal resistance and a relatively complex fabrication process. The second, simpler TEG design, achieves a significant resistance reduction and two different structural substrates (PI and paper) are compared. The paper-based TEG generates 17 nW (ΔT = 75 °C) at 60% strain, which represents more than twice the power generation while at rest (zero strain). On the other hand, polyimide produces more conductive TE films and higher power (~35 nW at ΔT = 75 °C) but due to its higher thermal conductivity, power does not increase at stretch. In conclusion, highly stretchable TEGs can lead to higher temperature gradients (thus higher power generation), given that thermal conductivity of the structural material is low enough. Furthermore, either horizontal or vertical displacement can be achieved with double-arm helical architecture, hence allowing to extend the device to any nearby and mobile heat sink for continuous, effectively higher power generation

A new movable plate concept is presented in this paper to realize mm-wave vertical on-chip antennas through MEMS based post-processing steps in a CMOS compatible process. By virtue of its vertical position, the antenna is isolated from the lossy Si substrate and hence performs with a better efficiency as compared to the horizontal position. In addition, the movable plate concept enables polarization diversity by providing both horizontal and vertical polarizations on the same chip. Through a first iteration fractal bowtie antenna design, dual band (60 and 77 GHz) operation is demonstrated in both horizontal and vertical positions without any change in dimensions or use of switches for two different mediums (Si and air). To support the movable plate concept, the transmission line and antenna are designed on a flexible polyamide, where the former has been optimized to operate in the bent position. The design is highly suitable for compact, low cost and efficient SoC solutions.

This paper reports the design of a proof-of-concept drug delivery device that is actuated using the bubbles formed during electrolysis. The device uses a platinum (Pt) coated nickel (Ni) metal foam and a solid drug in reservoir (SDR) approach to improve the device’s performance. This electrochemically-driven pump has many features that are unlike conventional drug delivery devices: it is capable of pumping periodically and being refilled automatically; it features drug release control; and it enables targeted delivery. Pt-coated metal foam is used as a catalytic reforming element, which reduces the period of each delivery cycle. Two methods were used for fabricating the Pt-coated metal: sputtering and electroplating. Of these two methods, the sputtered Pt-coated metal foam has a higher pumping rate; it also has a comparable recombination rate when compared to the electroplated Pt-coated metal foam. The only drawback of this catalytic reformer is that it consumes nickel scaffold. Considering long-term applications, the electroplated Pt metal foam was selected for drug delivery, where a controlled drug release rate of 2.2 μ g ± 0.3 μ g per actuation pulse was achieved using 4 mW of power.

This paper reports a versatile multi-user micro-fabrication process for MEMS devices, the “Polyimide MEMS Multi-User Process” (PiMMPs). The reported process uses polyimide as the structural material and three separate metallization layers that can be interconnected depending on the desired application. This process enables for the first time the development of out-of-plane compliant mechanisms that can be designed using six different physical principles for actuation and sensing on a wafer from a single fabrication run. These principles are electrostatic motion, thermal bimorph actuation, capacitive sensing, magnetic sensing, thermocouple-based sensing and radio frequency transmission and reception.