Duc Tung Vu

Mr. Duc Tung Vu

Electronics, Institut des Nanotechnologies de Lyon, Lyon, Auvergne-Rhône-Alpes, France
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Research Focus & Metrics

Academic Career Length

3Years (2024-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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1 June 2024 in Photonics
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Journal Article
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SGShaochen Gao
Shaochen Gao
DVDuc Tung Vu
Duc Tung Vu
TCThibauld Cazimajou
Thibauld Cazimajou
PPPatrick PITTET
Patrick PITTET
MBMartine Le Berre
Martine Le Berre
FCFrancis Calmon
Francis Calmon
The integration of Single-Photon Avalanche Diodes (SPADs) in CMOS Fully Depleted Silicon-On-Insulator (FD-SOI) technology under a buried oxide (BOX) layer and a silicon film containing transistors makes it possible to realize a 3D SPAD at the chip level. In our study, a nanostructurated layer created by an optimized arrangement of Shallow Trench Isolation (STI) above the photosensitive zone generates constructive interferences and consequently an increase in the light sensitivity in the frontside illumination. A simulation methodology is presented that couples electrical and optical data in order to optimize the STI trenches (size and period) and to estimate the Photon Detection Probability (PDP) gain. Then, a test chip was designed, manufactured, and characterized, demonstrating the PDP improvement due to the STI nanostructuring while maintaining a comparable Dark Count Rate (DCR).