We demonstrate a new optical approach to generate high-frequency (>15 MHz) and high-amplitude focused ultrasound, which can be used for non-invasive ultrasound therapy. A nano-composite film of carbon nanotubes (CNTs) and elastomeric polymer is formed on concave lenses, and used as an efficient optoacoustic source due to the high optical absorption of the CNTs and rapid heat transfer to the polymer upon excitation by pulsed laser irradiation. The CNT-coated lenses can generate unprecedented optoacoustic pressures of >50 MPa in peak positive on a tight focal spot of 75 μm in lateral and 400 μm in axial widths. This pressure amplitude is remarkably high in this frequency regime, producing pronounced shock effects and non-thermal pulsed cavitation at the focal zone. We demonstrate that the optoacoustic lens can be used for micro-scale ultrasonic fragmentation of solid materials and a single-cell surgery in terms of removing the cells from substrates and neighboring cells.

Metasurfaces are composed of periodic sub-wavelength nanostructures and exhibit optical properties that are not found in nature. They have been widely investigated for optical applications such as holograms, wavefront shaping, and structural color printing, however, electron-beam lithography is not suitable to produce large-area metasurfaces because of the high fabrication cost and low productivity. Although alternative optical technologies, such as holographic lithography and plasmonic lithography, can overcome these drawbacks, such methods are still constrained by the optical diffraction limit. To break through this fundamental problem, mechanical nanopatterning processes have been actively studied in many fields, with nanoimprint lithography (NIL) coming to the forefront. Since NIL replicates the nanopattern of the mold regardless of the diffraction limit, NIL can achieve sufficiently high productivity and patterning resolution, giving rise to an explosive development in the fabrication of metasurfaces. In this review, we focus on various NIL technologies for the manufacturing of metasurfaces. First, we briefly describe conventional NIL and then present various NIL methods for the scalable fabrication of metasurfaces. We also discuss recent applications of NIL in the realization of metasurfaces. Finally, we conclude with an outlook on each method and suggest perspectives for future research on the high-throughput fabrication of active metasurfaces.

We demonstrate carbon nanotube (CNT) composite-based optoacoustic transmitters that generate strong and high frequency ultrasound. The composite consists of CNTs grown on a substrate, which are embedded in elastomeric polymer used as an acoustic transfer medium. Under pulsed laser excitation, the composite generates very strong optoacoustic pressure: 18 times stronger than a Cr film reference and five times stronger than a gold nanoparticle composite with the same polymer. This enhancement persists over a broadband frequency range of up to 120 MHz and is confirmed by calculation. We suggest the CNT-polymer composites as highly efficient optoacoustic transmitters for high resolution ultrasound imaging.

We demonstrate the continuous fabrication of large-area flexible metamaterial films via roll-to-roll (R2R) nanoimprint lithography (NIL) technique that can be conducted in an ambient environment at high speed. The plasmonic metal-insulator-metal structure is successfully fabricated by R2R NIL to continuously pattern the sub-wavelength scale metal disk array on flexible substrates. The patterned metal disks having varying diameters and sub-micron spacing with few defects lead to the desired broadband IR filtering performance at the designed dual-band, which correlates well with simulation analysis. Our method realizes a simple and high-throughput fabrication of plasmonic metamaterials for scalable and flexible optoelectronic and photonic applications.