The diversity and practicability of terahertz metamaterials have experienced rapid development in the past decade due to the increasing demand for various devices. This topic has attracted significant interest from researchers. Among the key functional devices in terahertz metamaterial systems, the active control ability of terahertz metamaterials is highly valuable and captivating. This implies that the electromagnetic properties of metamaterials can be modulated over a wide dynamic range by external stimuli. This review categorizes the different types of tunable terahertz metamaterials based on the external stimuli to which they respond, namely, mechanical modulation, electrical modulation, magnetic modulation, and optical modulation. Mechanically modulated devices offer simple yet efficient modulation, while electrical and magnetic modulation provide effective active modulation through electrical mechanisms. Optical modulation, in contrast, focuses on incorporating various materials to achieve active modulation.

A tunable and compact mid-infrared optical parametric oscillator (OPO) based on BaGa₄Se₇ (BGSe) crystal with a repetition rate up to 250 Hz was demonstrated. A high energy and more approachable side-pumped Q-switched Nd:YAG laser was employed as the pump for the BGSe OPO. Due to the pump double-pass single-resonant oscillator (DP-SRO) configuration, the maximum average power of 250 mW and the maximum pulse energy of 1.28 mJ at 4.06 μm was achieved with the repetition rate of 250 Hz and 100 Hz, respectively. The tunable mid-infrared output from 3.42–4.73 μm was obtained. The influence of repetition rate and cavity length was studied and the thermal effect was analyzed.