Traditional humidity sensors for respiration monitoring applications have faced technical challenges, including low sensitivity, long recovery times, high parasitic capacitance and uncalibrated temperature drift. To overcome these problems, we present a triple-layer humidity sensor that comprises a nanoforest-based sensing capacitor, a thermistor, a microheater and a reference capacitor. When compared with traditional polyimide-based humidity sensors, this novel device has a sensitivity that is improved significantly by 8 times within a relative humidity range of 40–90%. Additionally, the integration of the microheater into the sensor can help to reduce its recovery time to 5 s. The use of the reference capacitor helps to eliminate parasitic capacitance, and the thermistor helps the sensor obtain a higher accuracy. These unique design aspects cause the sensor to have an excellent humidity sensing performance in respiration monitoring applications. Furthermore, through the adoption of machine learning algorithms, the sensor can distinguish different respiration states with an accuracy of 94%. Therefore, this humidity sensor design is expected to be used widely in both consumer electronics and intelligent medical instrument applications.

Flexible humidity sensors, as pivotal sensing components in the Internet of Things and intelligent era, have achieved significant progress in material innovation, fabrication engineering, and application diversification in recent years. This review systematically presents the current research status of flexible humidity sensors, focusing on the influence of novel humidity-sensitive materials(including polymers, metal oxides, carbon-based materials, and two-dimensional materials) on key performance metrics such as sensitivity, response time, and stability. The optimization effects of fabrication technologies such as screen printing, spraying, and deposition on device performance are also analyzed. Furthermore, the innovative applications of flexible humidity sensors in fields including healthcare, smart agriculture, smart homes, and human-machine interaction are elaborated in detail. These applications highlight the sensors’ adaptability to diverse environmental requirements and their potential to enable intelligent monitoring and interactive systems. Finally, future technological directions for flexible humidity sensors are proposed from the perspectives of material system innovation, improvement of multi-parameter collaborative sensing performance, and optimization of adaptability to complex environments. The proposed development directions are targeted at achieving higher precision, multifunctionality, and self-powered operation, providing insights and guidance for the research and development of next-generation flexible intelligent sensing devices. By bridging material science, manufacturing engineering, and application engineering, this comprehensive review provides a forward-looking perspective on advancing flexible humidity sensing technologies for emerging intelligent systems.

Stacked SiGe/Si structures are widely used as the units for gate-all-around nanowire transistors (GAA NWTs) which are a promising candidate beyond fin field effective transistors (FinFETs) technologies in near future. These structures deal with a several challenges brought by the shrinking of device dimensions. The preparation of inner spacers is one of the most critical processes for GAA nano-scale transistors. This study focuses on two key processes: inner spacer film conformal deposition and accurate etching. The results show that low pressure chemical vapor deposition (LPCVD) silicon nitride has a good film filling effect; a precise and controllable silicon nitride inner spacer structure is prepared by using an inductively coupled plasma (ICP) tool and a new gas mixtures of CH₂F₂/CH₄/O₂/Ar. Silicon nitride inner spacer etch has a high etch selectivity ratio, exceeding 100:1 to Si and more than 30:1 to SiO₂. High anisotropy with an excellent vertical/lateral etch ratio exceeding 80:1 is successfully demonstrated. It also provides a solution to the key process challenges of nano-transistors beyond 5 nm node.

An intelligent humidity sensing system has been developed for real-time monitoring of human behaviors through respiration detection. The key component of this system is a humidity sensor that integrates a thermistor and a micro-heater. This sensor employs porous nanoforests as its sensing material, achieving a sensitivity of 0.56 pF/%RH within a range of 60–90% RH, along with excellent long-term stability and superior gas selectivity. The micro-heater in the device provides a high operating temperature, enhancing sensitivity by 5.8 times. This significant improvement enables the capture of weak humidity variations in exhaled gases, while the thermistor continuously monitors the sensor’s temperature during use and provides crucial temperature information related to respiration. With the assistance of a machine learning algorithm, a behavior recognition system based on the humidity sensor has been constructed, enabling behavior states to be classified and identified with an accuracy of up to 96.2%. This simple yet intelligent method holds great potential for widespread applications in medical assistance analysis and daily health monitoring.

Semiconductor nanowires have great application prospects in field effect transistors and sensors. In this study, the process and challenges of manufacturing vertical SiGe/Si nanowire array by using the conventional lithography and novel dry atomic layer etching technology. The final results demonstrate that vertical nanowires with a diameter less than 20 nm can be obtained. The diameter of nanowires is adjustable with an accuracy error less than 0.3 nm. This technology provides a new way for advanced 3D transistors and sensors.

Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necessary in order to meet practical applications. Pirani sensors work by using the effect of air density on the heat conduction of the gas to cause temperature changes in sensitive structures, thus detecting the pressure in the surrounding environment and thus vacuum monitoring. In past decades, MEMS Pirani sensors have received considerable attention and practical applications because of their advances in simple structures, long service life, wide measurement range and high sensitivity. This review systematically summarizes and compares different types of MEMS Pirani sensors. The configuration, material, mechanism, and performance of different types of MEMS Pirani sensors are discussed, including the ones based on thermistors, thermocouples, diodes and surface acoustic wave. Further, the development status of novel Pirani sensors based on functional materials such as nanoporous materials, carbon nanotubes and graphene are investigated, and the possible future development directions for MEMS Pirani sensors are discussed. This review is with the purpose to focus on a generalized knowledge of MEMS Pirani sensors, thus inspiring the investigations on their practical applications.