The surface acoustic wave (SAW) gyroscopic effect in an interdigital transducer (IDT) deposited on a piezoelectric substrate is different from that in the piezoelectric substrate due to a reflection induced by IDT. In this work, an extended coupling-of-mode (COM) model including the gyroscopic effect and the reflection was developed to analyze the SAW gyroscopic effect. First, dispersion characteristics parameters of SAW were fitted according to the data derived using the finite element method (FEM). Then, variations of stop band edge frequency were calculated using the extended COM theory by integrating dispersion characteristics parameters into the COM model. We compared its results with those obtained via FEM analysis to confirm the proposed model’s validity. We found that the variation in stop band edge frequency related to gyroscope effect reached the maximum value with a zero reflectivity value. For split IDT, the sensitivity of gyroscope effect is 0.036 Hz/rad/s with a lower than 1% normalized thickness. Conversely, the value of sensitivity was almost zero for bidirectional IDT and electrode width controlled single-phase unidirectional transducer (EWC/SPUDT).
Electrode-width-controlled (EWC) single-phase unidirectional transducers (SPUDT) contribute to reduction of insertion loss of surface acoustic wave (SAW) devices due to their strong unidirectional properties. In this work, we propose a method to optimize the unidirectionality of EWC-SPUDT based on our research results that the unidirectionality of the EWC-SPUDT cell is strongly related to its reflectivity and its unidirectional angle. Furthermore, in order to ensure strong unidirectionality to achieve low insertion loss, a simulator based on the finite element method (FEM) is used to study the relationship between geometrical configuration of the EWC-SPUDT cell and its reflection coefficient, as well as its transduction coefficient. Simulation results indicate that the reflection coefficient of the optimized EWC-SPUDT cell composed of 128° YX lithium niobite (LiNbO3) substrate and Al electrodes with thickness of 0.3μm reaches the optimal value of 5.17% when the unidirectional angle is designed to be −90°. A SAW delay line is developed with the optimized EWC-SPUDT cell without weighing, and the simulation results are verified by experiments. The experimental results show that the directivity exceeds 30 dB at the center frequency and the insertion loss is just 6.7 dB.
This paper presents a new numerical approach for the full extraction of the coupling-of-modes (COM) parameters by stationary and eigenfrequency analyses in the finite element method (FEM). This is a fast method extracting from the results of static analysis and eigenfrequency analysis. It avoids the long calculation time of admittance frequency response analysis, which is commonly used in extracting COM parameters. In addition to the usual COM parameters (velocity, reflection coefficient, transduction coefficient and capacitance), the phases of reflection and transduction coefficient can be also extracted with this method. The proposed method was applied to different cutting types LiNbO3 with different types of thicknesses in a varying interdigital transducer (IDT). These examples show that our approach has great potential in extracting all the COM parameters of the Rayleigh SAW for all kinds of IDT structures. Therefore, it is a fast, accurate, general and full extraction approach of COM parameters.
The SAW (surface acoustic wave) gyroscopic effect is a key parameter that reflects the sensitivity performance of SAW angular velocity sensors. This study found that adding a layer of non-piezoelectric material with a lower reflection coefficient than that of the upper-layer material below the piezoelectric substrate to form a double-layer structure significantly enhanced the SAW gyroscopic effect, and the smaller the reflection coefficient of the lower-layer material, the stronger the SAW gyroscopic effect, with values being reached that were two to three times those with single-layer substrate structures. This was confirmed using a three-dimensional model, and the experimental results also showed that the thickness of the piezoelectric layer and the type of the lower-layer material also had a significant impact on the SAW gyroscopic effect. This novel discovery will pave the way for the future development of SAW angular velocity sensors.
A surface acoustic wave (SAW) gyroscope has many unique advantages, but a low detection sensitivity limits its development. Previous studies have shown that adding a metal dot array to the acoustic wave propagation path of the SAW delay line can enhance the Coriolis force and further improve sensitivity. Therefore, in order to optimize the detection sensitivity performance of the sensor, 128°YX-LiNbO3, ST-X Quartz and X112°Y-LiTaO3 piezoelectric substrates were selected by finite element method to analyze the influence of the metal dot array size on the SAW gyroscopic effect in this paper. The most suitable metal dot size for 128°YX-LiNbO3 and X112°Y-LiTaO3 obtained by simulation are and , respectively; for example, when the normalized angular velocity is 1 × 10−3, the SAW gyroscopic effect factor of the two piezoelectric substrates distributing the optimum size metal dots can reach 22.4 kHz and 5.2 kHz. For ST-X quartz, there is a threshold between the rotation speed of the substrate and the optimum size of the metal dot. When the rotating speed is lower than the threshold, the SAW gyroscopic effect is strongest when the metal dot size is ; otherwise, the SAW gyroscopic effect is strongest when the size is . These research results provide new ideas for improvement of the SAW gyroscope.
20 October 2024 in Information and Software Technology