Nowadays, with the development of wearable devices, stretchable pressure sensors have been widely adopted in all kinds of areas. Most of the sensors aim to detect small pressure, such as fingertip tactile sensing, but only a few are focused on high-pressure sensing, such as foot pressure sensing during men’s walking. In this work, a liquid metal-based stretchable sensor for large-pressure measurement is investigated. This sensor is fully stretchable because it is made of soft materials. However, when the soft sensor is subjected to high pressure, the liquid metal easily leaks from microchannels because it maintains the liquid state at room temperature. We therefore propose to fabricate liquid metal-based leakage-free electrodes to handle the liquid-metal leak. Parametric studies are conducted to compare this sensor with liquid-metal-only electrodes and leakage-free electrodes. The leakage-free electrodes increase the measurement ranges from 0.18, 0.18, and 0.15 MPa to 0.44 MPa, with higher linearity and precision. The improvement in the liquid-metal electrode enables the sensors to work stably within 0.44 MPa pressure and 20% strain. In addition, we integrate two capacitors, namely, a working capacitor and a reference capacitor, into one sensor to reduce the influence of parasitic capacitance brought about by external interference. This stretchable capacitive sensor capable of working under a wide range of pressure with good repeatability, sensitivity, and linearity, exhibits great potential use for wearable electronics. Finally, the method for fabricating leakage-free electrodes shows great value for hyperelastic electronics manufacturing and micromachine technology.

A liquid metal based microfluidic system was proposed and demonstrated for the generation and sorting of liquid metal droplets. This micro system utilized silicon oil as the continuous phase and Ga₆₆In_20.5Sn_13.5 (66.0 wt % Ga, 20.5 wt % In, 13.5 wt % Sn, melting point: 10.6 °C) as the dispersed phase to generate liquid metal droplets on a three-channel F-junction generator. The F-junction is an updated design similar to the classical T-junction, which has a special branch channel added to a T-junction for the supplement of 30 wt % aqueous NaOH solution. To perform active sorting of liquid metal droplets by dielectrophoresis (DEP), the micro system utilized liquid-metal-filled microchannels as noncontact electrodes to induce electrical fields through the droplet channel. The electrode channels were symmetrically located on both sides of the droplet channel in the same horizontal level. According to the results, the micro system can generate uniformly spherical liquid metal droplets, and control the flow direction of the liquid metal droplets. To better understand the control mechanism, a numerical simulation of the electrical field was performed in detail in this work.

A handy, flexible micro-thermocouple using low-melting-point metal alloys is proposed in this paper. The thermocouple has the advantages of simple fabrication and convenient integration. Bismuth/gallium-based mixed alloys are used as thermocouple materials. To precisely inject the metal alloys to the location of the sensing area, a micro-polydimethylsiloxane post is designed within the sensing area to prevent outflow of the metal alloy to another thermocouple pole during the metal-alloy injection. Experimental results showed that the Seebeck coefficient of this thermocouple reached −10.54 μV/K, which was much higher than the previously reported 0.1 μV/K. The thermocouple was also be bent at 90° more than 200 times without any damage when the mass ratio of the bismuth-based alloy was <60% in the metal-alloy mixture. This technology mitigated the difficulty of depositing traditional thin–film thermocouples on soft substrates. Therefore, the thermocouple demonstrated its potential for use in microfluidic chips, which are usually flexible devices.

A low voltage 3D parallel electroosmotic flow (EOF) pump composed of two electrode layers and a fluid layer is proposed in this work. The fluid layer contains twenty parallel fluid channels and is set at the middle of the two electrode layers. The distance between fluid and electrode channels was controlled to be under 45 μm, to reduce the driving voltage. Room temperature liquid metal was directly injected into the electrode channels by syringe to form non-contact electrodes. Deionized (DI) water with fluorescent particles was used to test the pumping performance of this EOF pump. According to the experimental results, a flow rate of 5.69 nL/min was reached at a driving voltage of 2 V. The size of this pump is small, and it shows a great potential for implanted applications. This structure could be easily expanded for more parallel fluid channels and larger flow rate.

A liquid-metal based spiral magnetohydrodynamic (MHD) micropump is proposed in this work. The micropump was fabricated in a polydimethylsiloxane (PDMS)-glass hybrid microfluidic chip. This pump utilized two parallel liquid-metal-filled channels as electrodes to generate a parallel electrical field across the pumping channel between the two electrodes. To prevent contact and cross contamination between the liquid metal in the electrode channel and the sample fluid in the pumping channel, a PDMS gap was designed between the liquid metal and the sample fluid. To minimize the chip size, the parallel electrode and pumping channels were designed in a spiral shape. To test pumping performance, NaCl aqueous solution containing fluorescent particles (0.5 μm in diameter) was filled into the pumping channel as the working sample fluid. When a pair of identical magnets (0.4 T) was placed onto both top and bottom surfaces of the chip, the pump was able to drive the sample fluid at a flow velocity of 233.26 μm/s at 3000 V. The pump has no moving parts, and the electrodes are easily fabricated, making the pump suitable for miniaturization and integration into microfluidic systems.

Injection of liquid metal into a polydimethylsiloxane (PDMS) channel can provide a simple, cheap, and fast method to fabricate a noncontact electrode for micro electroosmotic flow (EOF) pumps. In this study, a multi-stage EOF pump using liquid metal noncontact electrodes was proposed and demonstrated for high-flow-velocity applications. To test the pumping performance of this EOF pump and measure the flow velocity, fluorescent particles were added into deionized (DI) water to trace the flow. According to the experimental results, the pump with a five-stage design can drive a water flow of 5.57 μm/s at 10 V, while the PDMS gap between the electrode and the pumping channel is 20 μm. To provide the guidance for the pump design, parametric studies were performed and fully discussed, such as the PDMS gap, pumping channel dimension, and stage number. This multi-stage EOF pump shows potential for many high-flow-velocity microfluidic applications.