Tactile array sensor of the micro-cantilevers embedded in the elastomer has been fabricated to detect normal and 2-axes shear stresses. It is demonstrated that tactile array sensor with 3 times 3 detective elements can be fabricated with excellent yield. The sensor element is sensitive to both normal and shear stresses applied on entire sensor surface. Moreover, it has good directional characteristics so that it is shown that magnitude and direction of shear stress can be obtained by difference of output voltages of adjacent sensor cantilevers. The sensor output has good reproducibility for multiple measurement. The output from sensor element drastically changes with shifting applying position of force. It is considered that we can obtain pressed position from distribution of output from sensor element array.

A new fluorescent arrayed biosensor has been developed to discriminate species and concentrations of target proteins by using plural different phospholipid liposome species encapsulating fluorescent molecules, utilizing differences in permeation of the fluorescent molecules through the membrane to modulate liposome-target protein interactions. This approach proposes a basically new label-free fluorescent sensor, compared with the common technique of developed fluorescent array sensors with labeling. We have confirmed a high output intensity of fluorescence emission related to characteristics of the fluorescent molecules dependent on their concentrations when they leak from inside the liposomes through the perturbed lipid membrane. After taking an array image of the fluorescence emission from the sensor using a CMOS imager, the output intensities of the fluorescence were analyzed by a principal component analysis (PCA) statistical method. It is found from PCA plots that different protein species with several concentrations were successfully discriminated by using the different lipid membranes with high cumulative contribution ratio. We also confirmed that the accuracy of the discrimination by the array sensor with a single shot is higher than that of a single sensor with multiple shots.