In this paper, a fiber-optic Fabry–Perot (F–P) vibration sensor that can work at 800 °C is proposed. The F–P interferometer is composed of an upper surface of inertial mass placed parallel to the end face of the optical fiber. The sensor was prepared by ultraviolet-laser ablation and three-layer direct-bonding technology. Theoretically, the sensor has a sensitivity of 0.883 nm/g and a resonant frequency of 20.911 kHz. The experimental results show that the sensitivity of the sensor is 0.876 nm/g in the range of 2 g to 20 g at an operating frequency of 200 Hz at 20 °C. The nonlinearity was evaluated from 20 °C to 800 °C with a nonlinear error of 0.87%. In addition, the z-axis sensitivity of the sensor was 25 times higher than that of the x-axis and y-axis. The vibration sensor will have wide high-temperature engineering-application prospects.
High-temperature accelerometers have been widely used in aerospace, nuclear reactors, automobile technologies, etc. In this paper, a fiber-optic Fabry–Perot accelerometer (FOFPA) with a cantilever beam for high temperature is designed and experimentally demonstrated. The FOFPA is formed by bonding an all-silica in-line fiber Fabry–Perot etalon (ILFFPE) to one surface of the uniform cantilever beam with the lumped mass at the free end for acceleration measurement. The all silica in-line fiber FP etalon is made by welding two gold-coat single-mode fiber (GSMF) and a hollow silica glass tube (HST). The research results indicate that the sensitivity of the FOFPA is 0.02328rad/g, and the resonance frequency is 1146.6 Hz in the range of 1 g ~ 10 g. The high-temperature performance of the FOFPA was also evaluated. From 20 °C to 800 °C, the temperature drift is about 0.3178 nm/°C. The FOFPA has the potential of being applicable in higher temperatures compared to conventional accelerometers.