Ultrasonic wireless power transfer technology (UWPT) represents a key technology employed for energizing implantable medical devices (IMDs). In recent years, aluminum nitride (AlN) has gained significant attention due to its biocompatibility and compatibility with complementary metal-oxide-semiconductor (CMOS) technology. In the meantime, the integration of scandium-doped aluminum nitride (Al_90.4%Sc_9.6%N) is an effective solution to address the sensitivity limitations of AlN material for both receiving and transmission capabilities. This study focuses on developing a miniaturized UWPT receiver device based on AlScN piezoelectric micro-electromechanical transducers (PMUTs). The proposed receiver features a PMUT array of 2.8 × 2.8 mm² comprising 13 × 13 square elements. An acoustic matching gel is applied to address acoustic impedance mismatch when operating in liquid environments. Experimental evaluations in deionized water demonstrated that the power transfer efficiency (PTE) is up to 2.33%. The back-end signal processing circuitry includes voltage-doubling rectification, energy storage, and voltage regulation conversion sections, which effectively transform the generated AC signal into a stable 3.3 V DC voltage output and successfully light a commercial LED. This research extends the scope of wireless charging applications and paves the way for further device miniaturization by integrating all system components into a single chip in future implementations.

In recent years, implantable medical devices (IMDs) have introduced groundbreaking solutions for managing various health conditions. However, traditional implanted batteries necessitate periodic surgical replacement and tend to be relatively bulky, posing significant inconvenience to patients. To overcome these limitations, researchers have investigated various wireless power transfer (WPT) techniques, among which the ultrasonic wireless power transmission (UWPT) technique has distinct advantages. However, limited research has been conducted on ultrasonic power transfer at lower operating frequencies. Therefore, this study explores wireless power transfer using scandium-doped aluminum nitride (AlScN) piezoelectric micro-electromechanical transducers (PMUTs) in deionized (DI) water. Experimental results indicate that at an operating frequency of 14.075 kHz, the power transfer efficiency (PTE) can reach up to 2.68% under optimal load resistance conditions. Furthermore, a low-frequency UWPT system based on a AlScN PMUT has been developed, delivering a stable 3.3 V output for implantable medical devices and contributing to the advancement of a full-spectrum UWPT framework.