A detailed review on the development of quartz-enhanced photoacoustic sensors (QEPAS) for the sensitive and selective quantification of molecular trace gas species with resolved spectroscopic features is reported. The basis of the QEPAS technique, the technology available to support this field in terms of key components, such as light sources and quartz-tuning forks and the recent developments in detection methods and performance limitations will be discussed. Furthermore, different experimental QEPAS methods such as: on-beam and off-beam QEPAS, quartz-enhanced evanescent wave photoacoustic detection, modulation-cancellation approach and mid-IR single mode fiber-coupled sensor systems will be reviewed and analysed. A QEPAS sensor operating in the THz range, employing a custom-made quartz-tuning fork and a THz quantum cascade laser will be also described. Finally, we evaluated data reported during the past decade and draw relevant and useful conclusions from this analysis.

This review aims to discuss the latest advancements in quartz-enhanced photoacoustic spectroscopy (QEPAS) based trace-gas sensing. Starting from the QEPAS basic physical principles, the most used QEPAS configurations will be described. This is followed by a detailed theoretical analysis and experimental study regarding the influence of quartz tuning forks (QTFs) geometry on their optoacoustic transducer performance. Furthermore, an overview of the latest developments in QEPAS trace-gas sensor technology employing custom QTFs will be reported. Results obtained by exploiting novel micro-resonator configurations, capable of increasing the QEPAS signal-to-noise ratio by more than two orders of magnitude and the utilization of QTF overtone flexural modes for QEPAS based sensing will be presented. A comparison of the QEPAS performance of different spectrophone configurations is reported based upon signal-to-noise ratio. Finally, a novel QEPAS approach allowing simultaneous dual-gas detection will be described.

A sensitive spectroscopic sensor based on a hollow-core fiber-coupled quantum cascade laser (QCL) emitting at 10.54 μm and quartz enhanced photoacoustic spectroscopy (QEPAS) technique is reported. The design and realization of mid-IR fiber and coupler optics has ensured single-mode QCL beam delivery to the QEPAS sensor. The collimation optics was designed to produce a laser beam of significantly reduced beam size and waist so as to prevent illumination of the quartz tuning fork and microresonator tubes. ${\mathrm{SF}}_6$ was selected as the target gas. A minimum detection sensitivity of 50 parts per trillion in 1 s was achieved with a QCL power of 18 mW, corresponding to a normalized noise-equivalent absorption of $2.7\times {10}^{-10}\mathrm{W}·{\mathrm{cm}}^{-1}/{\mathrm{Hz}}^{1/2}$.

A quartz enhanced photoacoustic spectroscopy (QEPAS) sensor, employing an erbium-doped fiber amplified laser source and a custom quartz tuning fork (QTF) with its two prongs spaced ∼800 μm apart, is reported. The sensor employs an acoustic micro-resonator (AmR) which is assembled in an “on-beam” QEPAS configuration. Both length and vertical position of the AmR are optimized in terms of signal-to-noise ratio, significantly improving the QEPAS detection sensitivity by a factor of ∼40, compared to the case of a sensor using a bare custom QTF. The fiber-amplifier-enhanced QEPAS sensor is applied to H₂S trace gas detection, reaching a sensitivity of ∼890 ppb at 1 s integration time, similar to those obtained with a power-enhanced QEPAS sensor equipped with a standard QTF, but with the advantages of easy optical alignment, simple installation, and long-term stability.

We report on a spectroscopic technique named intracavity quartz-enhanced photoacoustic spectroscopy (I-QEPAS) employed for sensitive trace-gas detection in the mid-infrared spectral region. It is based on a combination of QEPAS with a buildup optical cavity. The sensor includes a distributed feedback quantum cascade laser emitting at 4.33 μm. We achieved a laser optical power buildup factor of ∼500, which corresponds to an intracavity laser power of ∼0.75 W. CO2 has been selected as the target molecule for the I-QEPAS demonstration. We achieved a detection sensitivity of 300 parts per trillion for 4 s integration time, corresponding to a noise equivalent absorption coefficient of 1.4 × 10−8 cm−1 and a normalized noise-equivalent absorption of 3.2 × 10−10 W cm−1 Hz−1/2.