A macro–micro dual-drive positioning system was developed for Scanning Beam Interference Lithography (SBIL) which uses a dual-frequency laser interferometer as the position reference and exhibits the characteristics of long travel, heavy load, and high accuracy. The macro-motion system adopts a friction-driven structure and a feedforward PID control algorithm, and the stroke can reach 1800 mm. The micro-motion system adopts a flexible hinge–plus-PZT driving method and a PID control algorithm based on neural networks, which achieves sufficient positioning accuracy of this system at the nanometer level. An optical-path-sealing system was used to reduce the measurement noise of the dual-frequency laser interferometer. The static stability of the positioning system, the stepping capacity of the macro-motion system, the stepping capacity of the micro-motion system, and the positioning accuracy of the system were tested and analyzed. Additionally, the sources and effects of errors during the motion process were assessed in detail. Finally, the experimental results show that the workbench can locate at the nanoscale within the full range of travel, which can satisfy the SBIL exposure requirement.

When scanning beam interference lithography (SBIL) technology is used for grating fabrication, the stroke, bearing capacity, and accuracy of the workbench determine the size and accuracy of the grating. For large-area gratings with dimensions exceeding the meter level, the existing workbench cannot fully meet the requirements. Therefore, the structure design, drive type, and assembly technology of the workbench were studied in this research, and a two-dimensional workbench with a large stroke, heavy load, and high precision was developed. The performance of this workbench was tested. The stroke of the workbench can reach 1800 mm × 700 mm; the straightness is better than 1.5 μm for the whole stroke range. The load can be up to 2.5 t and the positioning accuracy can achieve the nanometer level. A scanning exposure experiment was carried out with this workbench and a grating of 1400 mm × 420 mm was made. The performance index of the grating was outstanding, achieving the intended goals of the experiment.

A micro-confocal Raman spectrometer is developed using four tiled sub-gratings, each with a groove density of 1200 lines/mm, and a single optimized cylindrical lens. The system achieves a broad Raman shift coverage from 99.8 to 4701 cm⁻¹ with a spectral resolution of approximately 4 cm⁻¹, and operates without any mechanical moving parts. The cylindrical lens corrects multi-channel astigmatism, compressing the spot size to one quarter of its original dimension and improving the signal-to-noise ratio by a factor of four. The prototype successfully detects Raman signals from silicon, sodium nitrite, cyclohexane, and sodium sulfate solutions with concentrations as low as 0.01 mol/L. It also resolves inorganic mixtures, minerals including celestine, rhodonite, and calcite, as well as microplastics such as polyamide, polytetrafluoroethylene, polyethylene, and styrene-ethylene-butylene-styrene block copolymer. These results demonstrate that the spectrometer offers reliable qualitative and quantitative detection capabilities with both broad spectral bandwidth and high resolution.