The fabrication of SSD-free fused silica optics is a crucial objective for high-power laser applications. To treat the surface of polished fused silica, a combination of RIE/RIBE and deep-controlled etch (DCE) techniques are typically employed. Currently, it is important to consider and study the ideal etching depth and precision while using combined etching techniques to remove the identified SSD. Herein, we present a novel approach to identify the distribution of SSD in fused silica, which corresponds to a specific grinding/polishing process condition. Our method involves using a mobile RIBE to perform cone cutting and remove material from the polished fused silica surface. Afterward, we etch the optical element’s surface with HF to visualize the subsurface cracks and understand their relationship with the RIBE depth. Through a systematic investigation of the combined etching technique, we establish a correlation between the depth of RIBE and DCE and the performance of laser damage. The combined etching technique can be implemented as a dependable approach to treat the surface/subsurface defects in fused silica and has the potential to improve laser damage resistance significantly.

Near-infrared imaging devices are extensively used in medical diagnosis, night vision, and security monitoring. However, existing traditional imaging devices rely on a bunch of refracting lenses, resulting in large, bulky imaging systems that restrict their broader utility. The emergence of flat meta-optics offers a potential solution to these limitations, but existing research on compact integrated devices based on near-infrared meta-optics is insufficient. In this study, we propose an integrated NIR imaging camera that utilizes large-size metalens with a silicon nanostructure with high transmission efficiency. Through the detection of target and animal and plant tissue samples, the ability to capture biological structures and their imaging performance was verified. Through further integration of the NIR imaging device, the device significantly reduces the size and weight of the system and optimizes the aperture to achieve excellent image brightness and contrast. Additionally, venous imaging of human skin shows the potential of the device for biomedical applications. This research has an important role in promoting the miniaturization and lightweight of near-infrared optical imaging devices, which is expected to be applied to medical testing and night vision imaging.