The nonvolatile application of La-doped ZrO₂ (ZLO) antiferroelectric capacitors is demonstrated in this study, accompanied by systematic investigation of device reliability. A built-in electric field was successfully established through engineered work function modulation. The fabricated nonvolatile (NV) ZLO capacitor exhibits not only avoidance of wake-up and fatigue phenomena typically observed in ferroelectric systems but also demonstration of ultralow coercive voltage (2Vc = 1.2 V) and exceptional endurance exceeding 10¹² cycles. The inherent unique polarization reversal mechanism in NV ZLO device was identified as the origin of a unidirectional imprint effect. Accelerated testing at 85 °C for 10⁴ s yielded conclusive evidence of retention characteristic stability. This investigation provides a novel perspective for the engineering utilization of antiferroelectric materials and facilitates their potential incorporation into advanced integrated circuit architectures.

The conventional static imprint effect in Hf_xZr_1−xO₂ (HZO) ferroelectric (FE) devices, which degrades data retention, is generally characterized by a shift in the hysteresis loop along the electric field axis. Unlike the static imprint effect, the dynamic imprint effect emerges under dynamic electric fields or actual operating conditions, making the FE film exceptionally sensitive to switching pulse parameters and domain history. In HZO anti-ferroelectric (AFE) devices, this dynamic imprint effect alters the coercive field distribution associated with domain switching and poses a significant challenge to long-term stable device operation. This study systematically investigates the dynamic imprint effect and its recovery process using a comprehensive integration of first-order reversal curve (FORC) analysis, transient current-voltage (I-V), and polarization-voltage (P-V) characterization. By analyzing localized imprint behavior under sub-cycling conditions, mechanisms and recovery pathways of imprint in AFE devices are proposed. Finally, possible physics-based mechanisms describing imprint behaviors and recovery behaviors are discussed, providing insights for optimizing AFE memory technology performance and reliability.