Micro/nano-precision glass molding (MNPGM) is an efficient approach for manufacturing micro/nanostructured glass components with intricate geometry and a high-quality optical finish. In MNPGM, the mold, which directly imprints the desired pattern on the glass substrate, is a key component. To date, a wide variety of mold inserts have been utilized in MNPGM. The aim of this article is to review the latest advances in molds for MNPGM and their fabrication methods. Surface finishing is specifically addressed because molded glass is usually intended for optical applications in which the surface roughness should be lower than the wavelength of incident light to avoid scattering loss. The use of molds for a wide range of molding temperatures is also discussed in detail. Finally, a series of tables summarizing the mold fabrication methods, mold patterns and their dimensions, anti-adhesion coatings, molding conditions, molding methods, surface roughness values, glass substrates and their glass transition temperatures, and associated applications are presented. This review is intended as a roadmap for those interested in the glass molding field.

A simple and cost-effective method is proposed herein for a plasmonic nanoantenna array (PNAA) for the fabrication of metal-enhanced fluorescence (MEF) substrates in which fluorophores interact with the enhanced electromagnetic field generated by a localized surface plasmon to provide a higher fluorescence signal. The PNAA is fabricated by the deposition of a silver (Ag) layer on an ultraviolet (UV) nanoimprinted nanodot array with a pitch of 400 nm, diameter of 200 nm, and height of 100 nm. During deposition, raised Ag nanodisks and a lower Ag layer are, respectively, formed on the top and bottom of the imprinted nanodot array, and the gap between these Ag layers acts as a plasmonic nanoantenna. Since the thickness of the gap within the PNAA is influenced by the thickness of Ag deposition, the effects of the latter upon the geometrical properties of the fabricated PNAA are examined, and the electromagnetic field intensity distributions of PNAAs with various Ag thicknesses are simulated. Finally, the fluorescence enhancement factor (FEF) of the fabricated PNAA MEF substrate is measured using spotted Cy5-conjugated streptavidin to indicate a maximum enhancement factor of ~22× for the PNAA with an Ag layer thickness of 75 nm. The experimental results are shown to match the simulated results.

A simple and cost-effective fabrication method for plasmonic nanolens arrays (PNA) with a narrow gap has been proposed for fabricating enhanced fluorescence substrates, in which the fluorophores interacting with the enhanced electromagnetic field generated by localized surface plasmons provide a higher fluorescence signal. The PNA was fabricated by the sequential depositions of the SiO₂ and Ag layers on a UV-nanoimprinted nanodot array with a pitch of 500 nm, a diameter of 250 nm, and a height of 100 nm. During the deposition processes, the shape of the nanodots changed to that of nanolenses, and the gap between the nanolenses was decreased via sidewall deposition. To examine the feasibility of the fabricated PNA for enhanced fluorescence application, a streptavidin-Cy5 (SA-Cy5) conjugate dissolved in a saline buffer solution was spotted on the PNA, and the fluorescence signals of the SA-Cy5 were measured and compared with those on a bare glass substrate. The enhancement factor was affected by the gap between the nanolenses, and the maximum enhancement factor of ~128 was obtained from the PNA with a SiO₂ layer thickness of 150 nm and an Ag layer thickness of 100 nm. Finally, an electromagnetic field analysis was used to examine the fluorescence signal enhancement, and was conducted using rigorous coupled wave analysis.

Although polymer nanoimprinting on glass substrates has been widely employed for the fabrication of functional anti-reflective (AR) nanostructures, several drawbacks exist with respect to durability and delamination. The direct patterning of glass material is a potential solution for outdoor applications that require AR functional nanostructured glass plates. In this study, a glass imprinting technique was employed for the fabrication of an AR nanostructure on a soda-lime glass substrate using a vitreous carbon (VC) stamp. The VC stamp, which had a high aspect ratio nanopost array with a pitch of 325 nm, diameter of 110 nm, and height of ~220 nm, was fabricated by the carbonization of a replicated Furan precursor from an Si master. During the glass imprinting process using the nanopost array VC stamp, the softened glass material gradually protruded into the spaces between the nanopins owing to viscoelastic behavior, and one can achieve a cross-sinusoidal surface relief under specific imprinting condition, which can be used as an AR nanostructure with a gradually increasing refractive index. The effects of the processing temperature on the surface profile of the glass imprinted parts and the measured transmission spectra were analyzed, and a glass imprinting temperature of 700 °C and pressure of 1 MPa were found to be the optimum condition. The height of the fabricated cross-sinusoidal nanostructure was 80 nm, and the light transmission was increased by ~2% over the entire visible-light range. Furthermore, the measured transmission spectrum observed to be in good agreement with the simulation results.

This study reports a cost-effective method of replicating glass microfluidic chips using a vitreous carbon (VC) stamp. A glass replica with the required microfluidic microstructures was synthesized without etching. The replication method uses a VC stamp fabricated by combining thermal replication using a furan-based, thermally-curable polymer with carbonization. To test the feasibility of this method, a flow focusing droplet generator with flow-focusing and channel widths of 50 µm and 100 µm, respectively, was successfully fabricated in a soda-lime glass substrate. Deviation between the geometries of the initial shape and the vitreous carbon mold occurred because of shrinkage during the carbonization process, however this effect could be predicted and compensated for. Finally, the monodispersity of the droplets generated by the fabricated microfluidic device was evaluated.

The application of microtechnology to traditional mechanical industries is limited owing to the lack of suitable micropatterning technology for durable materials including metal. In this research, a glassy carbon (GC) micromold was applied for the direct metal forming (DMF) of a microstructure on an aluminum (Al) substrate. The GC mold with microdome cavities was prepared by carbonization of a furan precursor, which was replicated from the thermal reflow photoresist master pattern. A microdome array with a diameter of 8.4 μm, a height of ~0.74 μm, and a pitch of 9.9 μm was successfully fabricated on an Al substrate by using DMF at a forming temperature of 645 °C and an applied pressure of 2 MPa. As a practical application of the proposed DMF process, the enhanced boiling heat transfer characteristics of the DMF microdome Al substrate were analyzed. The DMF microdome Al substrate showed 20.4 ± 2.6% higher critical heat flux and 34.1 ± 5.3% higher heat transfer coefficient than those of a bare Al substrate.