Flexible pressure sensors are attracting great interest from researchers and are widely applied in various new electronic equipment because of their distinct characteristics with high flexibility, high sensitivity, and light weight; examples include electronic skin (E-skin) and wearable flexible sensing devices. This review summarizes the research progress of flexible pressure sensors, including three kinds of transduction mechanisms and their respective research developments, and applications in the fields of E-skin and wearable devices. Furthermore, the challenges and development trends of E-skin and wearable flexible sensors are also briefly discussed. Challenges of developing high extensibility, high sensitivity, and flexible multi-function equipment still exist at present. Exploring new sensing mechanisms, seeking new functional materials, and developing novel integration technology of flexible devices will be the key directions in the sensors field in future.
Silicon oxynitride (SiNxOy) is a highly promising functional material for its luminescence performance and tunable refractive index, which has wide applications in optical devices, non-volatile memory, barrier layer, and scratch-resistant coatings. This review presents recent developments, and discusses the preparation methods, performance, and applications of SiNxOy film. In particular, the preparation of SiNxOy film by chemical vapor deposition, physical vapor deposition, and oxynitridation is elaborated in details.
Flexible transparent conductive electrodes (TCEs) are widely applied in flexible electronic devices. Among these electrodes, silver (Ag) nanowires (NWs) have gained considerable interests due to their excellent electrical and optical performances. Ag NWs with a one-dimensional nanostructure have unique characteristics from those of bulk Ag. In past 10 years, researchers have proposed various synthesis methods of Ag NWs, such as ultraviolet irradiation, template method, polyol method, etc. These methods are discussed and summarized in this review, and we conclude that the advantages of the polyol method are the most obvious. This review also provides a more comprehensive description of the polyol method for the synthesis of Ag NWs, and the synthetic factors including AgNO3 concentration, addition of other metal salts and polyvinyl pyrrolidone are thoroughly elaborated. Furthermore, several problems in the fabrication of Ag NWs-based TCEs and related devices are reviewed. The prospects for applications of Ag NWs-based TCE in solar cells, electroluminescence, electrochromic devices, flexible energy storage equipment, thin-film heaters and stretchable devices are discussed and summarized in detail.
Neural microelectrode is the important bridge of information exchange between the human body and machines. By recording and transmitting nerve signals with electrodes, people can control the external machines. At the same time, using electrodes to electrically stimulate nerve tissue, people with long-term brain diseases will be safely and reliably treated. Young’s modulus of the traditional rigid electrode probe is not matched well with that of biological tissue, and tissue immune rejection is easy to generate, resulting in the electrode not being able to achieve long-term safety and reliable working. In recent years, the choice of flexible materials and design of electrode structures can achieve modulus matching between electrode and biological tissue, and tissue damage is decreased. This review discusses nerve microelectrodes based on flexible electrode materials and substrate materials. Simultaneously, different structural designs of neural microelectrodes are reviewed. However, flexible electrode probes are difficult to implant into the brain. Only with the aid of certain auxiliary devices, can the implant be safe and reliable. The implantation method of the nerve microelectrode is also reviewed.
All human activity is associated with the generation of electrical signals. These signals are collectively referred to as electrical physiology (EP) signals (e.g., electrocardiogram, electroencephalogram, electromyography, electrooculography, etc.), which can be recorded by electrodes. EP electrodes are not only widely used in the study of primary diseases and clinical practice, but also have potential applications in wearable electronics, human–computer interface, and intelligent robots. Various technologies are required to achieve such goals. Among these technologies, adhesion and stretchable electrode technology is a key component for rapid development of high-performance sensors. In last decade, remarkable efforts have been made in the development of flexible and high-adhesive EP recording systems and preparation technologies. Regarding these advancements, this review outlines the design strategies and related materials for flexible and adhesive EP electrodes, and briefly summarizes their related manufacturing techniques.