Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed.

An electronically controlled acoustic tweezer was used to demonstrate two acoustic manipulation phenomena: superposition of Bessel functions to allow independent manipulation of multiple particles and the use of higher-order Bessel functions to trap particles in larger regions than is possible with first-order traps. The acoustic tweezers consist of a circular 64-element ultrasonic array operating at 2.35MHz which generates ultrasonic pressure fields in a millimeter-scale fluid-filled chamber. The manipulation capabilities were demonstrated experimentally with 45 and 90-lm-diameter polystyrene spheres. These capabilities bring the dexterity of acoustic tweezers substantially closer to that of optical tweezers

We measure, in a single experiment, both the radiation pressure and the torque due to a wide variety of propagating acoustic vortex beams. The results validate, for the first time directly, the theoretically predicted ratio of the orbital angular momentum to linear momentum in a propagating beam. We experimentally determine this ratio using simultaneous measurements of both the levitation force and the torque on an acoustic absorber exerted by a broad range of helical ultrasonic beams produced by a 1000-element matrix transducer array. In general, beams with helical phase fronts have been shown to contain orbital angular momentum as the result of the azimuthal component of the Poynting vector around the propagation axis. Theory predicts that for both optical and acoustic helical beams the ratio of the angular momentum current of the beam to the power should be given by the ratio of the beam's topological charge to its angular frequency. This direct experimental observation that the ratio of the torque to power does convincingly match the expected value (given by the topological charge to angular frequency ratio of the beam) is a fundamental result.

We show that Bessel-function acoustic pressure fields can be used to trap and controllably position microparticles. A circular, 16-element ultrasound array generates and manipulates an acoustic field within a chamber, trapping microparticles and agglomerates. Changes in the phase of the sinusoidal signals applied to the array elements result in the movement of the Bessel-function pressure field and hence the microparticles. This demonstrates ultrasonic manipulation analogous to holographic optical tweezers. The manipulation limits of the device are explained by the existence of unwanted resonances within the manipulation chamber.

A capsule robot uses magnetic control and microultrasound feedback for in situ autonomous positioning and diagnostics of microanatomy.