The need for decreasing semiconductor device critical dimensions at feature sizes below the 20 nm resolution limit has led the semiconductor industry to adopt extreme ultra violet (EUV) lithography with exposure at 13.5 nm as the main next generation lithographic technology. The broad consensus on this direction has triggered a dramatic increase of interest on resist materials of high sensitivity especially designed for use in the EUV spectral region in order to meet the strict requirements needed for overcoming the source brightness issues and securing the cost efficiency of the technology. To this direction both fundamental studies on the radiation induced chemistry in this spectral area and a plethora of new ideas targeting at the design of new highly sensitive and top performing resists have been proposed. Besides the traditional areas of acid-catalyzed chemically amplified resists and the resists based on polymer backbone breaking new unconventional ideas have been proposed based on the insertion of metal compounds or compounds of other highly absorbing at EUV atoms in the resist formulations. These last developments are reviewed here. Since the effort targets to a new understanding of electron-induced chemical reactions that dominate the resist performance in this region these last developments may lead to unprecedented changes in lithographic technology but can also strongly affect other scientific areas where electron-induced chemistry plays a critical role.
In this work, the antimicrobial action of partially quaternized poly(2-(dimethylamino)ethyl methacrylate) (PQDMAEMA) copolymers using different alkyl halides is presented. The poly(2-(dimethylamino)ethyl methacrylate) (PDMAEMA) homopolymer was synthesized by group transfer polymerization, followed by the modification of its tertiary amine groups, using bromoethane, iodoethane, bromohexane and bromoethanol, to introduce permanent cationic, quaternary ammonium salt moieties, randomly distributed along the polymer chains. In all cases, the degree of quaternization was low, at ~10 mol%, as verified by proton nuclear magnetic resonance spectroscopy to preserve the thermo-responsive character of the PDMAEMA precursor polymer. The biocidal activity of the lightly quaternized PQDMAEMA copolymers against Escherichia coli and Staphylococcus aureus was evaluated by calculating the minimum inhibitory concentration (MIC) as well as the minimum bactericidal concentration (MBC) of the polymers and by comparing them to the respective values of the precursor non-quaternized PDMAEMA homopolymer. The antibacterial mechanism of action in the solution was studied by zeta potential measurements, scanning electron microscopy and protein leakage tests signifying the disruption of the outer membrane of the bacterial cells to release their periplasmic proteins.
Between April and May 2025, an outbreak of travel-associated Legionnaires’ disease (TALD) occurred, involving six cases at a hotel in Crete, Greece. Including two cases reported in 2023 and two additional cases from 2016 to 2017, ten cases were associated with this accommodation site. All TALD cases were reported by the European Legionnaires’ Disease Surveillance Network (ELDSNet). In compliance with the European Centre for Disease Prevention and Control (ECDC) surveillance and investigation protocols for hotels associated with the patient’s stay, local public health authorities conducted on-site inspections at the hotel by collecting water samples and performing risk assessments, while simultaneously recording the required epidemiological, environmental, and physicochemical data. A total of 181 statistically analyzed water samples showed positive rates for L. pneumophila of 12.71% (95% CI: 7.86–17.56) for (≥50 CFU/L) and 6.08% (95% CI: 2.60–9.56) for (≥1000 CFU/L). Risk assessments identified 18 stagnation points, systemic maintenance deficiencies, and high cumulative structural (30/52) and water (36/71) system risk scores. Low microbiological positivity of water samples does not necessarily equate to low risk, thus necessitating continuous risk assessment, implementation of Water Safety Plans (WSPs), and integrated monitoring by accommodation facilities to prevent LD cases.
4 November 2024 in Journal of Applied Crystallography
Between April and May 2025, an outbreak of travel-associated Legionnaires’ disease (TALD) occurred, involving six cases at a hotel in Crete, Greece. Including two cases reported in 2023 and two additional cases from 2016 to 2017, 10 cases were associated with this accommodation site. All TALD cases were reported by the European Legionnaires’ Disease Surveillance Network (ELDSNet). In accordance with the surveillance and investigation protocols of the European Centre for Disease Prevention and Control (ECDC), local public health authorities immediately upon notification of the cases conducted on-site inspections at the hotel via the collection of water samples and conducting risk assessments, while simultaneously recording the required epidemiological, environmental, and physicochemical data. A total of 181 statistically analyzed water samples showed positive rates for Legionella spp. 13.81% (95% CI: 9.14–19.71) (≥50 CFU/L) and 7.73% (95% CI: 4.29–12.64) (≥1000 CFU/L). Risk assessments identified 18 stagnation points, systemic maintenance deficiencies, and high cumulative structural (30/52) and water (36/71) system risk scores. Low microbiological positivity of water samples does not necessarily equate to low risk, thus necessitating continuous risk assessment, implementation of Water Safety Plans, and integrated monitoring by accommodation facilities to prevent Legionnaires’ disease cases.
11 May 2025 in Macromolecular Rapid Communications
The microphase separation in diblock copolymer films comprising two chemically similar methacrylate blocks, poly(2‐(dimethylamino)ethyl methacrylate) and poly(tetrahydropyranyl methacrylate), is investigated. Four symmetric diblock copolymers, with Mn ’s ranging from 4300 to 109 700 g mol −1 and narrow molecular weight distributions, are synthesized by group‐transfer polymerization, are spin‐coated from ethyl lactate solutions and are subsequently solvent vapor annealed. The two lower Mn copolymers dewet the silicon substrates after annealing, whereas the two higher Mn copolymers reveal the formation of holes and islands by optical microscopy, suggesting their microphase separation into lamellae structures orientated parallel to the substrate. The ordering of these weakly segregated diblock copolymers is verified by X‐ray reflectivity (XRR) and grazing‐incidence small‐angle X‐ray scattering (GISAXS). XRR provided the film thickness and lamellae spacing by probing along the direction perpendicular to the sample surface, whereas GISAXS probes the nanoscale morphology along the sample plane and the lateral and vertical correlation lengths of the films by analyzing the diffuse scattering. The lamellae thicknesses determined by XRR and GISAXS are in good agreement with those measured by atomic force microscopy. The results hold great promise for the development of highly functional ordered nanostructures in thin film geometries for applications in energy, catalysis, and others.