In this paper, we report on the characterization of the sensitivity and the directionality of a novel ultrasonic hydrophone fabricated by micro-electro-mechanical systems (MEMS) process, using aluminum nitride (AlN) thin film as piezoelectric functional layer and exploiting a stress-driven design. Hydrophone structure and fabrication consist of four piezoelectric cantilevers in cross configuration, whose first resonant frequency mode in water is designed between 20 kHz and 200 kHz. The MEMS fabricated structures exploit 1 µm and 2 µm thick piezoelectric AlN thin film embedded between two molybdenum electrodes grown by DC magnetron sputtering on silicon (Si) wafer. The 200 nm thick molybdenum electrodes thin layers add a stress-gradient through cantilever thickness, leading to an out-of-plane cantilever bending. A water resistant parylene conformal coating of 1 µm was deposited on each cantilever for waterproof operation. AlN upward bent cantilevers show maximum sensitivity up to −163 dB. The cross configuration of four stress-driven piezoelectric cantilevers, combined with an opportune algorithm for processing all data sensors, permits a finer directionality response of this hydrophone.

MEMS capacitive pressure sensors have proven to be more reliable in terms of temperature drift and long-term stability when compared to MEMS piezoresistive pressure sensors. In this study, a MEMS capacitive pressure sensor using micromachined technology has been designed and fabricated. As the movable electrode, a silicon membrane is used, while the fixed electrode is a gold metal film on a glass substrate. There is no deformation of the silicon membrane when the pressure is equal on both sides. As a result of the pressure of 0 kPa applied to the silicon membrane, a capacitance exists between it and the metal electrode. Differences in pressure on both sides of the silicon membrane will cause the membrane to deform. Silicon membranes deform due to pressure differences, which affect the capacitance between metal electrodes and silicon membranes. MEMS capacitive pressure sensors benefit from the superior mechanical properties of silicon material compared to metal-based sensors. Capacitive MEMS sensors are more desirable for applications requiring high performance and stability as compared to metal pressure sensors. This device is suited to measuring blood pressure with a measurement range of 0–45 kPa. When applied pressure was 0 kPa, the measurement capacitance was 3.61 pF, and when 45 kPa was applied, it was 7.19 pF.

The human cochlea is undeniably one of the most amazing organs in the body. One of its most intriguing features is its unique capability to convert sound waves into electrical nerve impulses. Humans can generally perceive frequencies between 20 Hz and 20 kHz with their auditory systems. Several studies have been conducted on building an artificial basilar membrane for the human cochlea (cochlear biomodel). It is possible to mimic the active behavior of the basilar membrane using micro-electromechanical systems (MEMSs). This paper proposes an array of MEMS bridge beams that are mechanically sensitive to the perceived audible frequency. They were designed to operate within the audible frequency range of bridge beams with 450 µm thickness and varying lengths between 200 µm and 2000 µm. As for the materials for the bridge beam structures, molybdenum (Mo), platinum (Pt), chromium (Cr) and gold (Au) have been considered. For the cochlear biomodel, gold has proven to be the best material, closely mimicking the basilar membrane, based on finite-element (FE) and lumped-element (LE) models.

This work presents a novel, highly sensitive, and directional piezoelectric cantilever-based micro-electro-mechanical system (MEMS) device conceived using a biomimetic approach of a fish’s lateral line system for marine sensing robotics. The device will consist of twelve cantilevers with different lengths in a cross-shaped configuration made with a piezoelectric thin film (PZT, ZnO, BaTiO₃) embedded between the top and bottom metals, Platinum (Pt) and Aluminum (Al), used as electrodes. This unique design of cantilevers in circular shapes has the advantage of directional response. A comparative study of these piezoelectric materials was performed analytically through the finite element method to design, model, and simulate our device in COMSOL software. Cantilever microstructures were simulated with lengths ranging from 100 to 1000 mm. The results show that PZT has the best performance with these materials. The maximum potential voltage was shown as 1.9 mV using the PZT material cantilever with 29 µm displacement.