This paper deals with a planar nanopositioning and -measuring machine, the so-called nanofabrication machine (NFM-100), in combination with a mounted atomic force microscope (AFM). This planar machine has a circular moving range of 100 mm. Due to the possibility of detecting structures in the nanometre range with an atomic force microscope and the large range of motion of the NFM-100, structures can be analysed with high resolution and precision over large areas by combining the two systems, which was not possible before. On the basis of a grating sample, line scans over lengths in the millimetre range are demonstrated on the one hand; on the other hand, the accuracy as well as various evaluation methods are discussed and analysed.

This work deals with various investigations into the accuracy of a newly developed planar nanopositioning machine. This machine, called Nanofabrication Machine 100 (NFM-100), has a positioning range of 100 mm in diameter. To determine the precision, various movement scenarios are performed with the machine table, and the trajectory deviation from the set trajectory is determined. In particular, the focus is on high velocities of up to 20 mm/s. Even at high speeds in the range of several millimetres per second, this machine can impress with its performance and only has a deviation in the nanometre range.

This contribution deals with the analysis of the positioning accuracy of a new Nano Fabrication Machine. This machine uses a planar direct drive system and has a positioning range up to 100 mm in diameter. The positioning accuracy was investigated in different movement scenarios, including phases of acceleration and deceleration. Also, the target position error of certain movements at different positions of the machine slider is considered. Currently, the NFM-100 is equipped with a tip-based measuring system. This Atomic Force Microscope (AFM) uses self-actuating and self-sensing microcantilevers, which can be used also for Field-Emission-Scanning-Probe-Lithography (FESPL). This process is capable of fabricating structures in the range of nanometres. In combination with the NFM-100 and its positioning range, nanostructures can be analysed and written in a macroscopic range without any tool change. However, the focus in this article is on the measurement and positioning accuracy of the tip-based measuring system in combination with the NFM-100 and is verified by repeated measurements. Finally, a linescan, realised using both systems, is shown over a long range of motion of 30 mm.

This paper explores large area application of tip-based nanofabrication by field emission scanning probe lithography and showcases the simultaneous possibility of atomic force microscopy on macroscopic scales. This is made possible by the combination of tip-based technology and a planar nanopositioning and nanomeasuring machine. Using long range atomic force microscopy measurement of regular grating structures, the performance of the machine is thoroughly characterized over the full 100 mm range of motion of the positioning machine, which was confirmed by repeated measurements. After initially focussing on achieving the minimum line width of < 40 nm in microscopic areas, a grating with a pitch of 1 μm is additionally fabricated over a total length of 10 mm, whereby the dimensions and deviations are also considered.

Microcantilevers offer a wide range of applications in sensor and measurement technology. In this work cantilever sensors are used as flow sensors. Most conventional flow sensors are often only calibrated for one type of gas and allow an analysis of gas mixtures only with increased effort. The sensor used here is a cantilever positioned vertically in the flow channel. It is possible to operate the sensor in dynamic and static mode. In the dynamic mode the cantilever is oscillating. Resonance frequency, resonance amplitude and phase are measured. In static mode, the bending of the cantilever is registered. The combination of the modes enables the different measured variables to be determined simultaneously. A flow influences the movement behaviour of the sensor, which allows the flow velocity to be deduced. In addition to determining the flow velocity, it is also possible to detect different types of gas. Each medium has certain properties (density and viscosity) which have different effects on the bending of the sensor. As a result, it is possible to measure the mixing ratio of a known binary gas mixture and their flow velocity simultaneously with a single sensor. In this paper this is investigated using the example of the air–carbon-dioxide mixture.