A novel vertical translational microactuator based on thin-film piezoelectric actuation is presented, using a set of four compound bend-up/bend-down unimorphs to produce translational motion of a moving platform or stage. The actuation material is a chemical-solution deposited lead–zirconate–titanate (PZT) thin film. Prototype designs have shown as much as 120 μm of static displacement, with 80–90 μm displacements being typical, using four 920 μm long by 70 μm legs. Analytical models are presented that accurately describe nonlinear behavior in both static and dynamic operation of prototype stages when the dependence of piezoelectric coefficients on voltage is known. Resonance of the system is observed at a frequency of 200 Hz. The large displacement and high bandwidth of the actuators at low-voltage and low-power levels should make them useful to a variety of optical applications, including endoscopic microscopy.

High frequency large scanning angle electrostatically actuated microelectromechanical systems (MEMS) mirrors are used in a variety of applications involving fast optical scanning. A 1-D parametrically resonant torsional micromirror for use in biomedical imaging is analyzed here with respect to operation by duty-cycled square waves. Duty-cycled square wave excitation can have significant advantages for practical mirror regulation and/or control. The mirror's nonlinear dynamics under such excitation is analyzed in a Hill's equation form. This form is used to predict stability regions (the voltage-frequency relationship) of parametric resonance behavior over large scanning angles using iterative approximations for nonlinear capacitance behavior of the mirror. Numerical simulations are also performed to obtain the mirror's frequency response over several voltages for various duty cycles. Frequency sweeps, stability results, and duty cycle trends from both analytical and simulation methods are compared with experimental results. Both analytical models and simulations show good agreement with experimental results over the range of duty cycled excitations tested. This paper discusses the implications of changing amplitude and phase with duty cycle for robust open-loop operation and future closed-loop operating strategies.

Point-of-care medical diagnosis demands immediate feedback on tissue pathology. Confocal endomicroscopy can provide real-time in vivo images with histology-like features. The working channel in medical endoscopes are becoming smaller in dimension. Microsystems methods can produce tiny mechanical scanners. We demonstrate a flexible fiber instrument for in vivo imaging as an endoscope accessory. The optical path is folded on-axis to reduce length while allowing the beam to expand and achieve a numerical aperture of 0.41. A high-speed parametric resonance mirror produces large deflection angles > 13°, and is mounted on a 2 mm diameter chip designed with clamp structures for reduced space. A compact lens assembly provides diffraction-limited lateral and axial resolution of 1.5 and 12 μm , respectively. A working distance of 50 μm and field-of-view of 350 μm x 350 μm are achieved. Miniature apparatus is fabricated to assemble and align the scanhead components. The optics and scanner are packaged in a distal tip with 2.4 mm diameter and 10 mm rigid length. These dimensions allow the endomicroscope to pass forward easily through the 2.8 mm diameter working channel in medical endoscopes commonly used in clinical practice. Fluorescence images are collected in vivo at 10 frames per second in the colon of genetically-engineered mice that spontaneously develop adenomas. A FITC-labeled peptide heterodimer is administered intravenously to provide specific contrast. Sub-cellular structures are visualized to distinguish pre-malignant from normal mucosa. These results demonstrate use of microsystems methods to produce an ultra-compact instrument with sufficiently small dimensions for broad use.

A novel three degree-of-freedom microactuator based on thin-film lead-zirconate-titanate (PZT) is described with its detailed structural model. Its central rectangular-shaped mirror platform, also referred to as the stage, is actuated by four symmetric PZT bending legs such that each leg provides vertical translation for one corner of the stage. It has been developed to support real-time in vivo vertical cross-sectional imaging with a dual axes confocal endomicroscope for early cancer detection, having large displacements in three axes (z, θx, θy) and a relatively high bandwidth in the z-axis direction. Prototype microactuators closely meet the performance requirements for this application; in the out-of-plane (z-axis) direction, it has shown more than 177 μm of displacement and about 84 Hz of structural natural frequency, when two diagonal legs are actuated at 14V. With all four legs, another prototype of the same design with lighter stage mass has achieved more than 430 μm of out-of-plane displacement at 15V and about 200 Hz of bandwidth. The former design has shown approximately 6.4° and 2.9° of stage tilting about the x-axis and y-axis, respectively, at 14V. This paper also presents a modeling technique that uses experimental data to account for the effects of fabrication uncertainties in residual stress and structural dimensions. The presented model predicts the static motion of the stage within an average absolute error of 14.6 μm, which approaches the desired imaging resolution, 5 μm, and also reasonably anticipates the structural dynamic behavior of the stage. The refined model will support development of a future trajectory tracking controller for the system.

A dynamic model is developed for small-scale robots with multiple high-frequency actuated compliant elastic legs and a rigid body. The motion of the small-scale robots results from dual-direction motion of piezoelectric actuators attached to the legs, with impact dynamics increasing robot locomotion complexity. A dynamic model is developed to describe the small-scale robot motion in the presence of variable properties of the underlying terrain. The dynamic model is derived from beam theory with appropriate boundary and loading conditions and considers each robot leg as a continuous structure moving in two directions. Robot body motion is modeled in up to five degrees-of-freedom (DOF) using a rigid body approximation for the central robot chassis. Individual modes of the resulting multimode robot are treated as second-order linear systems. The dynamic model is tested with two different centimeter-scale robot prototypes having an analogous actuation scheme to millimeter-scale microrobots. In accounting for the interaction between the robot and ground, a dynamic model using the first two modes of each leg shows good agreement with experimental results for the centimeter-scale prototypes, in terms of both magnitude and the trends in robot locomotion with respect to actuation conditions.

As a novel approach to future microrobotic locomotion, a multi-degree-of-freedom (m-DoF) microrobotic appendage is presented that generates large range of motion (5^° -40^°) in multiple axes using thin-film lead zirconate titanate (PZT) actuators. Due to the high driving force of PZT thin films and a robust fabrication process, m-DoF legs that retain acceptable payload capacity ( ~ 2 mg per leg) are achieved. The fabrication process permits thin-film PZT actuator integration with more complex higher aspect ratio silicon structures than previous related processes, using vertical silicon dioxide barrier trenches formed before PZT deposition to provide robust encapsulation of the silicon during later XeF₂ release. Planarization of the barrier trenches avoids detrimental effects on piezoelectric performance from the substrate alteration. Once fabricated, kinematic modeling of compact PZT actuator arrays in prototype leg joints is compared to experimental displacement measurements, demonstrating that piezoelectric actuator and assembled robot leg joint performance can be accurately predicted given certain knowledge of PZT properties and residual stress. Resonant frequencies, associated weight bearing, and power consumption are also obtained.