Optoelectronic effects of sidewall passivation on micro-sized light-emitting diodes (µLEDs) using atomic-layer deposition (ALD) were investigated. Moreover, significant enhancements of the optical and electrical effects by using ALD were compared with conventional sidewall passivation method, namely plasma-enhanced chemical vapor deposition (PECVD). ALD yielded uniform light emission and the lowest amount of leakage current for all µLED sizes. The importance of sidewall passivation was also demonstrated by comparing leakage current and external quantum efficiency (EQE). The peak EQEs of 20 × 20 µm² µLEDs with ALD sidewall passivation and without sidewall passivation were 33% and 24%, respectively. The results from ALD sidewall passivation revealed that the size-dependent influences on peak EQE can be minimized by proper sidewall treatment.

The developments of high performance InGaN based micro-light-emitting diodes (μLEDs) are discussed. We first review the early demonstrations of μLEDs and the state-of-the-art outstanding achievements on the emerging high-quality display and visible-light communication applications. Due to the miniature dimensions of μLEDs, the key understandings and the significant device advancements to achieve excellent energy efficiency are addressed. Lastly, two other critical challenges of μLEDs, namely full-color scheme and mass transfer technique, and their potential solutions are explored for future investigations.

Micro light-emitting diode (micro-LED) will play an important role in the future generation of smart displays. They are found very attractive in many applications, such as maskless lithography, biosensor, augmented reality (AR)/mixed reality etc, at the same time. A monitor that can fulfill saturated color rendering, high display resolution, and fast response time is highly desirable, and the micro-LED-based technology could be our best chance to meet these requirements. At present, semiconductor-based red, green and blue micro-LED chips and color-conversion enhanced micro-LEDs are the major contenders for full-color high-resolution displays. Both technologies need revolutionary ways to perfect the material qualities, fabricate the device, and assemble the individual parts into a system. In this roadmap, we will highlight the current status and challenges of micro-LED-related issues and discuss the possible advances in science and technology that can stand up to the challenges. The innovation in epitaxy, such as the tunnel junction, the direct epitaxy and nitride-based quantum wells for red and ultraviolet, can provide critical solutions to the micro-LED performance in various aspects. The quantum scale structure, like nanowires or nanorods, can be crucial for the scaling of the devices. Meanwhile, the color conversion method, which uses colloidal quantum dot as the active material, can provide a hassle-free way to assemble a large micro-LED array and emphasis the full-color demonstration via colloidal quantum dot. These quantum dots can be patterned by porous structure, inkjet, or photo-sensitive resin. In addition to the micro-LED devices, the peripheral components or technologies are equally important. Microchip transfer and repair, heterogeneous integration with the electronics, and the novel 2D material cannot be ignored, or the overall display module will be very power-consuming. The AR is one of the potential customers for micro-LED displays, and the user experience so far is limited due to the lack of a truly qualified display. Our analysis showed the micro-LED is on the way to addressing and solving the current problems, such as high loss optical coupling and narrow field of view. All these efforts are channeled to achieve an efficient display with all ideal qualities that meet our most stringent viewing requirements, and we expect it to become an indispensable part of our daily life.

We present efficient red InGaN 60 × 60 μm² micro-light-emitting diodes (μLEDs) with an epitaxial tunnel junction (TJ) contact. The TJ was grown by metal-organic chemical vapor deposition using selective area growth. The red TJ μLEDs show a uniform electroluminescence. At a low current density of 1 A/cm², the emission peak wavelength is 623 nm with a full-width half maximum of 47 nm. The peak external quantum efficiency (EQE) measured in an integrating sphere is as high as 4.5%. These results suggest a significant progress in exploring high efficiency InGaN red μLEDs using TJ technology.

InGaN-based red micro-size light-emitting diodes (μLEDs) have become very attractive. Compared to common AlInGaP-based red µLEDs, the external quantum efficiency (EQE) of InGaN red µLEDs has less influence from the size effect. Moreover, the InGaN red µLEDs exhibit a much more robust device performance even operating at a high temperature of up to 400 K. We review the progress of InGaN red μLEDs. Novel growth methods to relax the strain and increase the growth temperature of InGaN red quantum wells are discussed.