The high-precision diffraction grating is an important chromatic dispersion component that has been widely used in many fields, including laser beam combining, chirped pulse compression, spectroscopy, among others. In this paper, we review the development status of reflection and transmission gratings with high diffraction efficiency and high laser-induced damage thresholds, such as metal-film and multilayer-dielectric-film gratings. Then, we review the basic principles and most recent stages in the development of manufacturing techniques, such as mechanical scribing, holographic exposure, electron-beam lithography, and nanoimprinting.

Traditional reflective diffraction gratings working at 4.7 μm are fabricated by metal coatings. Due to the absorption of the metal itself, the diffraction efficiency (DE) could not reach over 95%. In this paper, we propose a 3 μm period multilayer grating design using hybrid multilayer dielectrics. With a layer of 0.353 μm Si and a layer of 0.905 μm SiO₂ forming the rectangular grating, the maximum of larger than 99.99% and the overall first-order DE reached 97.88%. The usable spectrum width is larger than 0.2 μm, more than four times larger than that of the pure Si rectangular grating. This high DE multilayer grating is an ideal element for high-power laser systems with the spectrum beam combining method.

There is currently no transmission grating with good diffraction efficiency in the 4.7 μm band. Metal gratings at this wavelength are all reflective gratings which has a diffraction efficiency of lower than 90% and lower laser damage threshold. In this paper, we bring up a design of a multi-layer transmission grating with both high diffraction efficiency and wide working wavelength band. We have proved that the transmission grating made of composite materials has an average diffraction effectiveness of more than 96% throughout the whole spectral range of 200 nm. Meanwhile, the theoretically computed transmission grating has a highest first-order diffraction efficiency of more than 99.77% at 4746 nm. This multilayer dielectric film transmission grating’s optimized design may further boost spectral beam combining power, providing a practical technique for increasing SBC power and brightness.

Since surface relief transmission gratings have very strict requirements on operators and use environment, according to the semiconductor laser external cavity spectral beam combining system, this paper proposes a design scheme for a semiconductor laser array spectral beam combining system based on the grating-external cavity. The finite element approach was used to create a wideband, high-efficiency fill-in multilayer dielectric transmission grating structure for a high-power spectrum beam combining system. The incidence angle, ridge height, duty cycle, and sidewall inclination angle of the transmission grating were tuned and evaluated, and a link between the transmission grating’s diffraction efficiency and grating characteristics was discovered. The calculated design of the high-power fused silica transmission grating has a negative first-order peak diffraction efficiency of 99.5% in the 800 nm range. In the spectral region of 765–872 nm, the transmission grating’s diffraction effectiveness exceeds 92%. The filled ultra-high diffraction efficiency multilayer dielectric transmission grating design addresses the issue of resistance to high-power lasers under complicated operating settings. It is intended to maintain a high diffraction efficiency even after several cleaning cycles, and it is an ideal component for high-power spectrum beam combining systems.

Since surface relief transmission gratings have very strict requirements on operators and use environment, according to the semiconductor laser external cavity spectral beam combining system, this paper proposes a design scheme of semiconductor laser array spectral beam combining system based on grating-external cavity. The finite element approach was used to create a wideband, high-efficiency fill-in multilayer dielectric transmission grating structure for a high-power spectrum beam combining system. The incidence angle, ridge height, duty cycle, and sidewall inclination angle of the transmission grating were tuned and evaluated, and a link between the transmission grating's diffraction efficiency and grating characteristics was discovered. The calculated design of the high-power fused silica transmission grating has a negative first-order peak diffraction efficiency of 99.5% in the 800nm range. In the spectral region of 765-872 nm, the transmission grating's diffraction effectiveness exceeds 92%. The filled ultra-high diffraction efficiency multilayer dielectric transmission grating design addresses the issue of resistance to high-power lasers under complicated operating settings, it’s intended to maintain a high diffraction efficiency even after several cleaning cycles, and it’s an ideal component for high-power spectrum beam combining systems.