A wireless passive high-temperature pressure sensor without evacuation channel fabricated in high-temperature co-fired ceramics (HTCC) technology is proposed. The properties of the HTCC material ensure the sensor can be applied in harsh environments. The sensor without evacuation channel can be completely gastight. The wireless data is obtained with a reader antenna by mutual inductance coupling. Experimental systems are designed to obtain the frequency-pressure characteristic, frequency-temperature characteristic and coupling distance. Experimental results show that the sensor can be coupled with an antenna at 600 °C and max distance of 2.8 cm at room temperature. The senor sensitivity is about 860 Hz/bar and hysteresis error and repeatability error are quite low.

In this paper, we present an approach to develop an optical gas leak sensor that can be used to measure ethylene, dimethyl ether, and methane. The sensor is designed based on the principles of IR absorption spectrum detection, and comprises two crossed elliptical surfaces with a folded reflection-type optical path. We first analyze the optical path and the use of this structure to design a miniature gas sensor. The proposed sensor includes two detectors (one to acquire the reference signal and the other for the response signal), the light source, and the filter, all of which are integrated in a miniature gold-plated chamber. We also designed a signal detection device to extract the sensor signal and a microprocessor to calculate and control the entire process. The produced sensor prototype had an accuracy of ±0.05%. Experiments which simulate the transportation of hazardous chemicals demonstrated that the developed sensor exhibited a good dynamic response and adequately met technical requirements.