Mechanical (hardness and adhesion) and electrical (sheet resistance) characteristics of electrolytically produced copper coatings have been investigated. Morphologies of Cu coatings produced galvanostatically at two current densities from the basic sulfate electrolyte and from an electrolyte containing levelling/brightening additives without and with application of ultrasound for the electrolyte stirring were characterized by SEM and AFM techniques. Mechanical characteristics were examined by Vickers microindentation using the Chen–Gao (C–G) composite hardness model, while electrical characteristics were examined by the four-point probe method. Application of ultrasound achieved benefits on both hardness and adhesion of the Cu coatings, thereby the use of both the larger current density and additive-free electrolyte improved these mechanical characteristics. The hardness of Cu coatings calculated according to the C–G model was in the 1.1844–1.2303 GPa range for fine-grained Cu coatings obtained from the sulfate electrolyte and in the 0.8572–1.1507 GPa range for smooth Cu coatings obtained from the electrolyte with additives. Analysis of the electrical characteristics of Cu coatings after an aging period of 4 years showed differences in the sheet resistance between the top and the bottom sides of the coating, which is attributed to the formation of a thin oxide layer on the coating surface area.

Self-powered sensors are gaining a lot of attention in recent years due to their possible application in the Internet of Things, medical implants and wireless and wearable devices. Human breath detection has applications in diagnostics, medical therapy and metabolism monitoring. One possible approach for breath monitoring is detecting the humidity in exhaled air. Here, we present an extremely sensitive, self-powered sensor for breath humidity monitoring. As a power source, the sensor uses electromagnetic energy harvested from the environment. Even electromagnetic energy harvested from the human body is enough for the operation of this sensor. The signal obtained using the human body as a source was up to 100 mV with an estimated power of 1 nW. The relatively low amount of energy that could be harvested in this way was producing a signal that was modulated by an interdigitated capacitor made out of electrochemically activated aluminum. The signal obtained in this way was rectified by a set of Schottky diodes and measured by a voltmeter. The sensor was capable of following a variety of different respiration patterns during normal breathing, exercise and rest, at the same time powered only by electromagnetic energy harvested from the human body. Everything happened in the normal environment used for everyday work and life, without any additional sources, and at a safe level of electromagnetic radiation.

A detailed examination of the principle of operation behind the functioning of the full-self-powered humidity sensor is presented. The sensor has been realized as a structure consisting of an interdigitated capacitor with aluminum thin-film digits. In this work, the details of its fabrication and activation are described in detail. The performed XRD, FTIR, SEM, AFM, and EIS analyses, as well as noise measurements, revealed that the dominant process of electricity generation is the electrochemical reaction between the sensor’s aluminum electrodes and the water from humid air in the presence of oxygen, which was the main goal of this work. The response of the sensor to human breath is also presented as a demonstration of its possible practical application.

The advancement of laser-induced graphene (LIG) has significantly enhanced the development of wearable and flexible electronic devices. Due to its exceptional physical, chemical, and electronic properties, LIG has emerged as a highly effective active material for wearable sensors. However, despite the wide range of materials suitable as precursors for LIG, the scarcity of stretchable and biocompatible polymers amenable to laser graphenization has remained a persistent challenge. In this study, laser-induced graphene (LIG) was fabricated directly on biocompatible and flexible cross-linked PDMS/PEG (with Mn (PEG) = 400 g/mol) composites for the first time, enabling their application in wearable sensors. The addition of PEG compensates for the low carbon content in PDMS, enabling efficient laser graphenization. Laser parameters were systematically optimized to achieve high-quality graphene, and a comprehensive characterization with varying PEG content (10–40 wt.%) was conducted using multiple analytical techniques. Tensile tests revealed that incorporating PEG significantly enhanced elongation at break, reaching 237% for PDMS/40 wt.% PEG while reducing Young’s modulus to 0.25 MPa, highlighting the excellent flexibility of the substrate material. Surface analysis using X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and Raman spectroscopy demonstrated the formation of high-quality few-layer graphene with the fewest defects in PDMS/40 wt.% PEG composites. Nevertheless, the adhesion of electrical contacts to LIG that was directly induced on PDMS/PEG proved to be challenging. To overcome this challenge, we produced devices by means of laser induction on polyimide and transfer to PDMS/PEG. We demonstrate the practical utility of such devices by applying them to monitor limb motion in real time. The sensor showed a stable and repeatable piezoresistive response under multiple bending cycles. These results provide valuable insights into the fabrication of biocompatible LIG-based flexible sensors, paving the way for their broader implementation in medical and sports technologies.

The key equipment for performing aerodynamic testing of objects, such as road and railway vehicles, aircraft, and wind turbines, as well as stationary objects such as bridges and buildings, are multichannel pressure measurement instruments (pressure scanners). These instruments are typically based on arrays of separate pressure sensors built in an enclosure that also contains temperature sensors used for temperature compensation. However, there are significant limitations to such a construction, especially when increasing requirements in terms of miniaturization, the number of pressure channels, and high measurement performance must be met at the same time. In this paper, we present the development and realization of an innovative MEMS multisensor chip, which is designed with the intention of overcoming these limitations. The chip has four MEMS piezoresistive pressure-sensing elements and two resistive temperature-sensing elements, which are all monolithically integrated, enabling better sensor matching and thermal coupling while providing a high number of pressure channels per unit area. The main steps of chip development are preliminary chip design, numerical simulations of the chip’s mechanical behavior when exposed to the measured pressure, final chip design, fabrication processes (photolithography, thermal oxidation, diffusion, layer deposition, micromachining, anodic bonding, and wafer dicing), and electrical testing.

The existing instruments for aerodynamic pressure measurements are usually built around an array of discrete pressure sensors, placed in the same housing together with a few discrete temperature sensors. However, this approach is limiting, especially regarding miniaturization, sensor matching, and thermal coupling. In this work, we intend to overcome these limitations by proposing a novel MEMS multisensor chip, which has a monolithically integrated matrix of four piezoresistive MEMS pressure-sensing elements and two resistive temperature-sensing elements. After finishing the preliminary chip design, we performed computer simulations in order to assess its mechanical behavior when measured pressure is applied. Subsequently, the final chip design was completed, and the first batch was fabricated. The used technological processes included photolithography, thermal oxidation, diffusion, sputtering, micromachining (wet chemical etching), anodic bonding, and wafer dicing.