A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V) characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance. The −6 dB center frequency is 540 kHz and the transducer has a bandwidth of 840 kHz for a relative bandwidth of 155%. Underwater pressure of 143.43 Pa is achieved 1 m away from the capacitive micromachined ultrasonic transducer under 20 excitation. Two-dimensional underwater ultrasonic imaging, which is able to prove that a rectangular object is present underwater, is achieved. The results presented here indicate that our work will be highly beneficial for the establishment of an underwater ultrasonic imaging system.

Currently, breast cancer is one of the most common cancers in women all over the world. A novel 3D breast ultrasound imaging ring system using the linear array transducer is proposed to decrease costs, reduce processing difficulties, and improve patient comfort as compared to modern day breast screening systems. The 1 × 128 Piezoelectric Micromachined Ultrasonic Transducer (PMUT) linear array is placed 90 degrees cross-vertically. The transducer surrounds the mammary gland, which allows for non-contact detection. Once the experimental platform is built, the breast model is placed through the electric rotary table opening and into a water tank that is at a constant temperature of 32 °C. The electric rotary table performs a 360° scan either automatically or mechanically. Pulse echo signals are captured through a circular scanning method at discrete angles. Subsequently, an ultrasonic tomography algorithm is designed, and a horizontal slice imaging is realized. The experimental results indicate that the preliminary detection of mass is realized by using this ring system. Circular scanning imaging is obtained by using a rotatable linear array instead of a cylindrical array, which allows the size and location of the mass to be recognized. The resolution of breast imaging is improved through the adjustment of the angle interval (>0.05°) and multiple slices are gained through different transducer array elements (1 × 128). These results validate the feasibility of the system design as well as the algorithm, and encourage us to implement our concept with a clinical study in the future.

A mathematical model of a sensor is vital to deeply comprehend its working principle and implement its optimal design. However, mathematical models of piezo-resistive eight-beam three-axis accelerometers have rarely been reported. Furthermore, those works are largely focused on the analysis of sensing acceleration in the normal direction, rather than in three directions. Therefore, a complete mathematical model of a piezo-resistive eight-beam three-axis accelerometer is developed in this paper. The validity of the mathematical model is proved by a Finite Element Method (FEM) simulation. Furthermore, the accelerometer is fabricated and tested. The prime sensitivities of X, Y and Z axes are 0.209 mV/g, 0.212 mV/g and 1.247 mV/g at 160 Hz, respectively, which is in accord with the values obtained by the model. The reason why the prime sensitivity S_ZZ is bigger than S_XX and S_YY is explained. Besides, it is also demonstrated why the cross-sensitivities S_XZ and S_YZ exceed S_ZX and S_ZY. Compared with the FEM model, the developed model could be helpful in evaluating the performance of three-axis accelerometers in an accurate and rapid way.

Capacitive micromachined ultrasound transducers (CMUTs) have broad application prospects in medical imaging, flow monitoring, and nondestructive testing. CMUT arrays are limited by their fabrication process, which seriously restricts their further development and application. In this paper, a vacuum-sealed device for medical applications is introduced, which has the advantages of simple manufacturing process, no static friction, repeatability, and high reliability. The CMUT array suitable for medical imaging frequency band was fabricated by a silicon wafer bonding technology, and the adjacent array devices were isolated by an isolation slot, which was cut through the silicon film. The CMUT device fabricated following this process is a 4 × 16 array with a single element size of 1 mm × 1 mm. Device performance tests were conducted, where the center frequency of the transducer was 3.8 MHz, and the 6 dB fractional bandwidth was 110%. The static capacitance (29.4 pF) and center frequency (3.78 MHz) of each element of the array were tested, and the results revealed that the array has good consistency. Moreover, the transmitting and receiving performance of the transducer was evaluated by acoustic tests, and the receiving sensitivity was −211 dB @ 3 MHz, −213 dB @ 4 MHz. Finally, reflection imaging was performed using the array, which provides certain technical support for the research of two-dimensional CMUT arrays in the field of 3D ultrasound imaging.

Ultrasound is a powerful and versatile technology that has been applied extensively in medicine and scientific research. The development of miniature underwater robots focuses on achieving specific tasks, such as surveys and inspections in confined spaces. However, traditional sonar has limited use in micro underwater robots due to its large size and heavy power demands. Conversely, capacitive micromechanical ultrasonic transducers (CMUTs) offer various advantages, including a wide bandwidth, compact size, and integration feasibility. These attributes make CMUTs a candidate for obstacle avoidance in micro underwater robots. Hence, a novel CMUT structure using Si-Si bonding is proposed. In this design, a membrane isolation layer replaces the cavity bottom isolation layer, simplifying the process and improving bond reliability. A finite element model of the CMUT was constructed in COMSOL and numerically assessed for the CMUT’s operating frequency, collapse voltage, and submerged depth. The CMUT, manufactured using micro-electro-mechanical system (MEMS) technology, undergoes waterproofing with PDMS—A material with similar acoustic impedance to water and corrosion resistance. Underwater tests reveal the CMUT’s resonant frequency in water as approximately 2 MHz, with a −3 dB bandwidth of 108.7%, a transmit/receive beam width of 7.3°, and a standard deviation of measured distance from the true distance of less than 0.05. These outcomes suggest that CMUTs hold promise in obstacle avoidance applications for fish-shaped underwater robots.

The biomedical acoustic signal plays an important role in clinical non-invasive diagnosis. In view of the deficiencies in early diagnosis of cardiovascular diseases, acoustic properties of S₁ and S₂ heart sounds are utilized. In this paper, we propose an integrated concave cilium MEMS heart sound sensor. The concave structure enlarges the area for receiving sound waves to improve the low-frequency sensitivity, and realizes the low-frequency and high-sensitivity characteristics of an MEMS heart sound sensor by adopting a reasonable acoustic package design, reducing the loss of heart sound distortion and faint heart murmurs, and improving the auscultation effect. Finally, experimental results show that the integrated concave ciliated MEMS heart sound sensor’s sensitivity reaches −180.6 dB@500 Hz, as compared with the traditional bionic ciliated MEMS heart sound sensor; the sensitivity is 8.9 dB higher. The sensor has a signal-to-noise ratio of 27.05 dB, and has good heart sound detection ability, improving the accuracy of clinical detection methods.