The research field of metasurfaces has attracted considerable attention in recent years due to its high potential to achieve flat, ultrathin optical devices of high performance. Metasurfaces, consisting of artificial patterns of subwavelength dimensions, often require fabrication techniques with high aspect ratios (HARs). Bosch and Cryogenic methods are the best etching candidates of industrial relevance towards the fabrication of these nanostructures. In this paper, we present the fabrication of Silicon (Si) metalenses by the UV-Nanoimprint Lithography method and cryogenic Deep Reactive Ion Etching (DRIE) process and compare the results with the same structures manufactured by Bosch DRIE both in terms of technological achievements and lens efficiencies. The Cryo- and Bosch-etched lenses attain efficiencies of around 39% at wavelength λ = 1.50 µm and λ = 1.45 µm against a theoretical level of around 61% (for Si pillars on a Si substrate), respectively, and process modifications are suggested towards raising the efficiencies further. Our results indicate that some sidewall surface roughness of the Bosch DRIE is acceptable in metalense fabrication, as even significant sidewall surface roughness in a non-optimized Bosch process yields reasonable efficiency levels.

This study presents the effect of temperature on the mechanical and tribological properties of SU-8 polymer. The temperature of investigated samples increasing during testing and the variation of mechanical and tribological properties were monitored. The samples for tests were SU-8 hard baked at different temperatures. The hard bake temperature changes the mechanical and tribological properties of polymers. The aim of this research work is the reliability design improvement of SU-8 microstructures from electro-thermally actuated devices where a thermal gradient produces the softening and modification of SU-8 behavior. As a function of the hard baked temperature, different mechanical and tribological properties were experimentally determined using the atomic force microscopy (AFM) technique. The mechanical properties of interest are the modulus of elasticity and hardness. The investigated tribological properties involve the adhesion and friction forces. The modulus of elasticity and hardness decrease if the operating temperature increases based on the thermal relaxation of material and their viscoelastic behavior. The adhesion force between AFM tip and investigated samples increases if the operating temperature increases, respectively. The same evolution was experimentally observed in the case of friction force. Moreover, for the same testing temperature, the modulus of elasticity and hardness increase, and the adhesion and friction forces decrease if the SU-8 is hard baked at high temperature.

The rapid evolution of healthcare technology is being driven by advancements in Micro-Electro-Mechanical Systems (MEMS), BioMEMS (Biological MEMS), and the expanding concept of the Internet of Bodies (IoB). This review explores the convergence of these three domains and their transformative impact on personalized medicine (PM), with a focus on smart, connected biomedical devices. Starting from the historical development of MEMS for medical sensing and diagnostics, the review traces the emergence of BioMEMS as biocompatible, minimally invasive solutions for continuous monitoring and real-time intervention. The integration of such devices within the IoB ecosystem enables data-driven, remote, and predictive healthcare, offering tailored diagnostics and treatment for chronic and acute conditions alike. The paper classifies IoB-associated technologies into non-invasive, invasive, and incorporated devices, reviewing wearable systems such as smart bracelets, e-tattoos, and smart footwear, as well as internal devices including implantable and ingestible. Alongside these opportunities, significant challenges persist, particularly in device biocompatibility, data interoperability, cybersecurity, and ethical regulation. By synthesizing recent advances and critical perspectives, this review aims to provide a comprehensive understanding of the current landscape, clinical potential, and future directions of MEMS, BioMEMS, and IoB-enabled personalized healthcare.

In this study, we report the fabrication and multi-technique characterization of pure and rare-earth (RE)-doped ZnO thin films using nanostructured microclusters synthesized via electrospinning followed by calcination. Lanthanum (La), erbium (Er), and samarium (Sm) were each incorporated at five concentrations (0.1–5 at.%) into ZnO, and the resulting powders were drop-cast as thin films on glass substrates. This approach enables the transfer of pre-engineered nanoscale morphologies into the final thin-film architecture. The morphological analysis by scanning electron microscopy (SEM) revealed a predominance of spherical nanoparticles and nanorods, with distinct variations in size and aspect ratio depending on dopant type and concentration. X-ray diffraction (XRD) and Rietveld analysis confirmed the wurtzite ZnO structure with increasing evidence of secondary phase formation at high dopant levels (e.g., Er₂O₃, Sm₂O₃, and La(OH)₃). Raman spectroscopy showed peak shifts, broadening, and defect-related vibrational modes induced by RE incorporation, in agreement with the lattice strain and crystallinity variations observed in XRD. Elemental mapping (EDX) confirmed uniform dopant distribution. Optical transmittance exceeded 70% for all films, with Tauc analysis revealing slight bandgap narrowing (Eg = 2.93–2.97 eV) compared to pure ZnO. This study demonstrates that rare-earth doping via electrospun nanocluster precursors is a viable route to engineer ZnO thin films with tunable structural and optical properties. Despite current limitations in film-substrate adhesion, the method offers a promising pathway for future transparent optoelectronic, sensing, or UV detection applications, where further interface engineering could unlock their full potential.