This article presents a physical model of the threshold voltage in MOSFETs valid down to 4.2 K. Interface traps close to the band edge modify the saturating temperature behavior of the threshold voltage observed in cryogenic measurements. Dopant freezeout, bandgap widening, and uniformly distributed traps in the bandgap do not change the qualitative behavior of the threshold voltage over temperature. Care should be taken because dopant freezeout results in a different physical definition of the threshold voltage. Using different definitions changes significantly the threshold current level. The proposed model is experimentally validated with measurements in large-area nMOS and pMOS devices of a commercial 28-nm bulk CMOS process down to 4.2 K. Our modeling results suggest that a pMOS-specific phenomenon in the gate stack is responsible for the non-saturating temperature behavior of the threshold voltage in pMOS devices.

Characterization, modeling, and development of cryo-temperature CMOS technologies (cryo-CMOS) have significantly progressed to help overcome the interconnection bottleneck between qubits and the readout interface in quantum computers. Nevertheless, available compact models still fail to predict the deviation of 1/f noise from the expected linear scaling with temperature ( ${T}$ ), referred to as “excess 1/f noise,” observed at cryogenic temperatures. In addition, 1/f noise represents one of the main limiting factors for the decoherence time of qubits. In this article, we extensively characterize low-frequency noise on commercial 28-nm CMOS and on research-grade Ge-channel MOSFETs at temperatures ranging from 370 K down to 4 K. Our investigations exclude electron heating and bulk dielectric defects as possible causes of the excess 1/f noise at low temperatures. We show further evidence for a strong correlation between the excess 1/f noise and the saturation of the subthreshold swing (SS) observed at low temperatures. The most plausible cause of the excess noise is found in band tail states in the channel acting as additional capture/emission centers at cryogenic temperatures.