A monolithic dual-wavelength DFB laser array based on sidewall gratings and a novel modulation of the grating coupling coefficient is proposed and demonstrated experimentally. The grating coupling coefficient distribution along the cavity is modulated by changing the alignment between the gratings on the two sidewalls. The frequency difference between the two lasing modes can be modulated by changing the cavity length and grating recess depth. A series of microwave signals in the range of 50 GHz to 59 GHz is observed after beating the two optical lines in a photodetector. The measured optical linewidths are 250 kHz and 850 kHz when the cavity length is 1200 μm and 1000 μm, respectively.
A novel AlGaInAs/InP electro-absorption modulated laser (EML) with a simple fabrication process is proposed, in which the electro-absorption modulator (EAM) has a 10 nm blueshift induced by quantum well intermixing (QWI) and is monolithically integrated with a sidewall grating distributed-feedback (DFB) laser working at 1.55 μm wavelength. The extent of the QWI process is characterized by a diffusion length. The quantum confined Stark effect (QCSE) is simulated in terms of extinction ratio (ER) and chirp for bias electric fields from 0 kV/cm to 200 kV/cm and for different amounts of intermixing. The results indicate that for a 150 µm-long EAM with a 10 nm blueshift induced by QWI, an ER of 40 dB is obtained at 2.5 V reverse bias with no penalty in chirp compared to an as-grown quantum well (QW) and the insertion loss at 0 V bias is 0.11 dB for 1.55 µm operation wavelength. The simulated –3 dB bandwidth of the electrical to optical power response is 22 GHz.
1 November 2019 in Journal of Vacuum Science & Technology B
Migrating electronic-photonic integrated circuits (EPICs) to higher data rates requires efficient electrical interfaces. This can be achieved with microwave technologies such as coplanar and microstrip transmission lines, but these can be difficult to apply in EPICs because of the complexity of the fabrication processes associated with monolithic integration. In this work, the authors report a novel method for planarizing a thick, low-κ film based on multiple-spins of layers of hydrogen silsesquioxane without a need for thermal curing. Films of total thicknesses of 5 and 6μm were planarized on a heavily doped InP substrate and used to realize coplanar waveguide transmission lines. The film shape is defined as an integral part of the fabrication process without any need for etching. A coplanar waveguide with a characteristic impedance of between 48 and 56Ω over the frequency range 10 MHz–67 GHz was demonstrated.
We present an electroabsorption modulated laser based on an identical epitaxial scheme, side-wall grating, on- chip microwave probe interface, and a new low-permittivity planarization method. The modulation speed is significantly increased by reducing the electrode capacitance by planarizing with a 5- $\mu \text{m}$ -thick HSQ layer. Furthermore, implementing the electrode with a direct ground-signal-ground probe interface provides a straightforward interconnection that obviates the need for an external circuit and bonding wires. The device operates at 1565 nm wavelength with stable single-mode lasing, no mode-hopping, and a side mode suppression ratio above 35 dB. An extinction ratio of 19.5 dB was recorded at the maximum modulator bias of −4 V. The electrical to optical power response of the modulated signal at–3-dBo demonstrated a 19 GHz bandwidth at an extinction ratio of 7 dB, which supports error-free data transmission up to 27 Gbit/s.
By using asymmetric twin-waveguide technology, a 1.55-μm sidewall grating distributed feedback laser monolithically integrated with a passive waveguide crossing was for the first time demonstrated for an optical beam forming network, which needs only one metalorganic vapor-phase epitaxy step. The distributed feedback laser with uncoated facets presents a side-mode suppression ratio of >44 dB and a low 3-dB linewidth of 68 kHz. An elliptical parabolic taper waveguide crossing had a theoretical crosstalk suppression ratio of 40 dB, while the measured cross-talk suppression ratio was at least 20 dB.
A 1.55 μm AlGaInAs multi-quantum-well (MQW) ridge waveguide polarization mode controller (PMC) is proposed. The design is based on an asymmetric half-ridge waveguide structure in which the ridge is shallow etched on one side and has a deeply etched mesa structure on the other side. The Finite-Element Method (FEM) was used to simulate the PMC and optimize its structural parameters comprehensively. Furthermore, the fabrication tolerances were also investigated in detail. The optimized PMC has a polarization conversion efficiency (PCE) of around 92.5% with a half-beat length of 1250 μm. When the PMC length was fixed at 1250 μm, to achieve a PCE derivation less than 8%, the tolerances for the ridge waveguide width and shallow etch height were 1.60 μm to 1.65 μm and 2.13 μm to 2.18 μm, respectively. In order to reduce interband gap absorption loss, the quantum well intermixing (QWI) technique was used in the model to realize a blueshift (200 nm) in the PMC. QWI is a simple, flexible, and low-cost technique for fabricating a PMC integrated with a laser diode and reduces parasitic reflections, which would otherwise degrade the overall performance. QWI also eliminates MQW material anisotropy and alleviates the birefringence effect without the need for regrowth, achieving nearly uniform properties as a bulk material.